JPS5616367B1 - - Google Patents
Info
- Publication number
- JPS5616367B1 JPS5616367B1 JP3650372A JP3650372A JPS5616367B1 JP S5616367 B1 JPS5616367 B1 JP S5616367B1 JP 3650372 A JP3650372 A JP 3650372A JP 3650372 A JP3650372 A JP 3650372A JP S5616367 B1 JPS5616367 B1 JP S5616367B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3151—Etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2130605A DE2130605C3 (de) | 1971-06-21 | 1971-06-21 | Sontrastierungsverfahren für mikroskopisch zu untersuchende Objekte |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5616367B1 true JPS5616367B1 (ja) | 1981-04-16 |
Family
ID=5811289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3650372A Pending JPS5616367B1 (ja) | 1971-06-21 | 1972-04-13 |
Country Status (8)
Country | Link |
---|---|
US (1) | US3859535A (ja) |
JP (1) | JPS5616367B1 (ja) |
AT (1) | AT336306B (ja) |
CH (1) | CH541137A (ja) |
DE (1) | DE2130605C3 (ja) |
FR (1) | FR2142998B1 (ja) |
GB (1) | GB1353424A (ja) |
SE (1) | SE375381B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2433690C2 (de) * | 1974-07-12 | 1984-04-26 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe | Vorrichtung zur Oberflächenbehandlung einer metallographischen Probe |
US4307283A (en) * | 1979-09-27 | 1981-12-22 | Eaton Corporation | Plasma etching apparatus II-conical-shaped projection |
US4614639A (en) * | 1985-04-26 | 1986-09-30 | Tegal Corporation | Compound flow plasma reactor |
US4915917A (en) * | 1987-02-19 | 1990-04-10 | The Johns Hopkins University | Glow discharge unit |
US5148714A (en) * | 1990-10-24 | 1992-09-22 | Ag Processing Technology, Inc. | Rotary/linear actuator for closed chamber, and reaction chamber utilizing same |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2200909A (en) * | 1937-11-30 | 1940-05-14 | Berghaus | Metallization of metal articles by cathode disintegration |
US3308049A (en) * | 1963-03-06 | 1967-03-07 | Gen Electric | Glow discharge apparatus for treating workpieces |
US3418229A (en) * | 1965-06-30 | 1968-12-24 | Weston Instruments Inc | Method of forming films of compounds having at least two anions by cathode sputtering |
US3477936A (en) * | 1967-06-29 | 1969-11-11 | Ppg Industries Inc | Sputtering of metals in an atmosphere of fluorine and oxygen |
US3604970A (en) * | 1968-10-14 | 1971-09-14 | Varian Associates | Nonelectron emissive electrode structure utilizing ion-plated nonemissive coatings |
US3704216A (en) * | 1969-09-11 | 1972-11-28 | Texas Instruments Inc | Method of depositing a metal oxide film by electron bombardment |
US3650930A (en) * | 1969-10-27 | 1972-03-21 | Gen Electric | Glow discharge masking process |
-
1971
- 1971-06-21 DE DE2130605A patent/DE2130605C3/de not_active Expired
-
1972
- 1972-04-13 JP JP3650372A patent/JPS5616367B1/ja active Pending
- 1972-06-07 AT AT491772A patent/AT336306B/de not_active IP Right Cessation
- 1972-06-09 GB GB2702172A patent/GB1353424A/en not_active Expired
- 1972-06-12 US US262082A patent/US3859535A/en not_active Expired - Lifetime
- 1972-06-12 CH CH877872A patent/CH541137A/de not_active IP Right Cessation
- 1972-06-13 FR FR727221266A patent/FR2142998B1/fr not_active Expired
- 1972-06-15 SE SE7207937A patent/SE375381B/xx unknown
Also Published As
Publication number | Publication date |
---|---|
DE2130605B2 (de) | 1973-07-19 |
FR2142998B1 (ja) | 1973-07-13 |
ATA491772A (de) | 1976-08-15 |
DE2130605C3 (de) | 1974-02-07 |
DE2130605A1 (de) | 1973-01-11 |
CH541137A (de) | 1973-08-31 |
SE375381B (ja) | 1975-04-14 |
US3859535A (en) | 1975-01-07 |
FR2142998A1 (ja) | 1973-02-02 |
GB1353424A (en) | 1974-05-15 |
AT336306B (de) | 1977-04-25 |