JPS56160964U - - Google Patents
Info
- Publication number
- JPS56160964U JPS56160964U JP5994680U JP5994680U JPS56160964U JP S56160964 U JPS56160964 U JP S56160964U JP 5994680 U JP5994680 U JP 5994680U JP 5994680 U JP5994680 U JP 5994680U JP S56160964 U JPS56160964 U JP S56160964U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5994680U JPS56160964U (zh) | 1980-05-02 | 1980-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5994680U JPS56160964U (zh) | 1980-05-02 | 1980-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56160964U true JPS56160964U (zh) | 1981-11-30 |
Family
ID=29654406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5994680U Pending JPS56160964U (zh) | 1980-05-02 | 1980-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56160964U (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013145483A1 (ja) * | 2012-03-30 | 2013-10-03 | 日東電工株式会社 | 蒸着装置及び蒸着方法 |
| CN115537734A (zh) * | 2021-06-30 | 2022-12-30 | 佳能特机株式会社 | 成膜装置、成膜方法及蒸发源单元 |
| CN115537760A (zh) * | 2021-06-30 | 2022-12-30 | 佳能特机株式会社 | 成膜装置、成膜方法及蒸发源单元 |
-
1980
- 1980-05-02 JP JP5994680U patent/JPS56160964U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013145483A1 (ja) * | 2012-03-30 | 2013-10-03 | 日東電工株式会社 | 蒸着装置及び蒸着方法 |
| JP2013209702A (ja) * | 2012-03-30 | 2013-10-10 | Nitto Denko Corp | 蒸着装置及び蒸着方法 |
| CN115537734A (zh) * | 2021-06-30 | 2022-12-30 | 佳能特机株式会社 | 成膜装置、成膜方法及蒸发源单元 |
| CN115537760A (zh) * | 2021-06-30 | 2022-12-30 | 佳能特机株式会社 | 成膜装置、成膜方法及蒸发源单元 |
| JP2023006677A (ja) * | 2021-06-30 | 2023-01-18 | キヤノントッキ株式会社 | 成膜装置、成膜方法及び蒸発源ユニット |
| JP2023006676A (ja) * | 2021-06-30 | 2023-01-18 | キヤノントッキ株式会社 | 成膜装置、成膜方法及び蒸発源ユニット |
| CN115537734B (zh) * | 2021-06-30 | 2024-04-19 | 佳能特机株式会社 | 成膜装置、成膜方法及蒸发源单元 |