Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Shomei Precision Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Toshiba Shomei Precision Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd, Toshiba Shomei Precision CorpfiledCriticalTokyo Shibaura Electric Co Ltd
Priority to JP6223180ApriorityCriticalpatent/JPS56159050A/en
Publication of JPS56159050ApublicationCriticalpatent/JPS56159050A/en
Publication of JPS6356671B2publicationCriticalpatent/JPS6356671B2/ja