JPS5615583B2 - - Google Patents
Info
- Publication number
- JPS5615583B2 JPS5615583B2 JP15095176A JP15095176A JPS5615583B2 JP S5615583 B2 JPS5615583 B2 JP S5615583B2 JP 15095176 A JP15095176 A JP 15095176A JP 15095176 A JP15095176 A JP 15095176A JP S5615583 B2 JPS5615583 B2 JP S5615583B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/30—Apparatus or processes specially adapted for manufacturing resistors adapted for baking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49099—Coating resistive material on a base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15095176A JPS5375472A (en) | 1976-12-17 | 1976-12-17 | Method of producing thin film resistive ic |
US05/860,618 US4161431A (en) | 1976-12-17 | 1977-12-14 | Process for producing thin film resistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15095176A JPS5375472A (en) | 1976-12-17 | 1976-12-17 | Method of producing thin film resistive ic |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5375472A JPS5375472A (en) | 1978-07-04 |
JPS5615583B2 true JPS5615583B2 (ja) | 1981-04-10 |
Family
ID=15507978
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15095176A Granted JPS5375472A (en) | 1976-12-17 | 1976-12-17 | Method of producing thin film resistive ic |
Country Status (2)
Country | Link |
---|---|
US (1) | US4161431A (ja) |
JP (1) | JPS5375472A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6029384U (ja) * | 1983-08-05 | 1985-02-27 | オ−ヤマ照明株式会社 | 照明器具 |
JPS63129984U (ja) * | 1987-02-18 | 1988-08-25 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4283259A (en) * | 1979-05-08 | 1981-08-11 | International Business Machines Corporation | Method for maskless chemical and electrochemical machining |
JPS55166949A (en) * | 1979-06-15 | 1980-12-26 | Fujitsu Ltd | Manufacture of thin film hybrid integrated circuit |
US4766450A (en) * | 1987-07-17 | 1988-08-23 | Xerox Corporation | Charging deposition control in electrographic thin film writting head |
US6703666B1 (en) * | 1999-07-14 | 2004-03-09 | Agere Systems Inc. | Thin film resistor device and a method of manufacture therefor |
US7214295B2 (en) | 2001-04-09 | 2007-05-08 | Vishay Dale Electronics, Inc. | Method for tantalum pentoxide moisture barrier in film resistors |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3387952A (en) * | 1964-11-09 | 1968-06-11 | Western Electric Co | Multilayer thin-film coated substrate with metallic parting layer to permit selectiveequential etching |
US3489656A (en) * | 1964-11-09 | 1970-01-13 | Western Electric Co | Method of producing an integrated circuit containing multilayer tantalum compounds |
US3423260A (en) * | 1966-03-21 | 1969-01-21 | Bunker Ramo | Method of making a thin film circuit having a resistor-conductor pattern |
US3544287A (en) * | 1967-04-13 | 1970-12-01 | Western Electric Co | Heat treatment of multilayered thin film structures employing oxide parting layers |
US3607679A (en) * | 1969-05-05 | 1971-09-21 | Bell Telephone Labor Inc | Method for the fabrication of discrete rc structure |
US3786557A (en) * | 1972-05-22 | 1974-01-22 | G Bodway | Fabrication of thin film resistors |
-
1976
- 1976-12-17 JP JP15095176A patent/JPS5375472A/ja active Granted
-
1977
- 1977-12-14 US US05/860,618 patent/US4161431A/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6029384U (ja) * | 1983-08-05 | 1985-02-27 | オ−ヤマ照明株式会社 | 照明器具 |
JPS63129984U (ja) * | 1987-02-18 | 1988-08-25 |
Also Published As
Publication number | Publication date |
---|---|
JPS5375472A (en) | 1978-07-04 |
US4161431A (en) | 1979-07-17 |