JPS5615567U - - Google Patents

Info

Publication number
JPS5615567U
JPS5615567U JP9785579U JP9785579U JPS5615567U JP S5615567 U JPS5615567 U JP S5615567U JP 9785579 U JP9785579 U JP 9785579U JP 9785579 U JP9785579 U JP 9785579U JP S5615567 U JPS5615567 U JP S5615567U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9785579U
Other languages
Japanese (ja)
Other versions
JPS6015246Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9785579U priority Critical patent/JPS6015246Y2/ja
Publication of JPS5615567U publication Critical patent/JPS5615567U/ja
Application granted granted Critical
Publication of JPS6015246Y2 publication Critical patent/JPS6015246Y2/ja
Expired legal-status Critical Current

Links

JP9785579U 1979-07-16 1979-07-16 電子顕微鏡等における試料装置 Expired JPS6015246Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9785579U JPS6015246Y2 (ja) 1979-07-16 1979-07-16 電子顕微鏡等における試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9785579U JPS6015246Y2 (ja) 1979-07-16 1979-07-16 電子顕微鏡等における試料装置

Publications (2)

Publication Number Publication Date
JPS5615567U true JPS5615567U (enrdf_load_stackoverflow) 1981-02-10
JPS6015246Y2 JPS6015246Y2 (ja) 1985-05-14

Family

ID=29330641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9785579U Expired JPS6015246Y2 (ja) 1979-07-16 1979-07-16 電子顕微鏡等における試料装置

Country Status (1)

Country Link
JP (1) JPS6015246Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125570U (ja) * 1984-01-31 1985-08-23 三井東圧化学株式会社 ガスの検知素子
JP2016131060A (ja) * 2015-01-13 2016-07-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125570U (ja) * 1984-01-31 1985-08-23 三井東圧化学株式会社 ガスの検知素子
JP2016131060A (ja) * 2015-01-13 2016-07-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置
WO2016114033A1 (ja) * 2015-01-13 2016-07-21 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
US10192713B2 (en) 2015-01-13 2019-01-29 Hitachi High-Technologies Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPS6015246Y2 (ja) 1985-05-14

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