JPS56155446U - - Google Patents

Info

Publication number
JPS56155446U
JPS56155446U JP5193480U JP5193480U JPS56155446U JP S56155446 U JPS56155446 U JP S56155446U JP 5193480 U JP5193480 U JP 5193480U JP 5193480 U JP5193480 U JP 5193480U JP S56155446 U JPS56155446 U JP S56155446U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5193480U
Other languages
Japanese (ja)
Other versions
JPS6141229Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5193480U priority Critical patent/JPS6141229Y2/ja
Publication of JPS56155446U publication Critical patent/JPS56155446U/ja
Application granted granted Critical
Publication of JPS6141229Y2 publication Critical patent/JPS6141229Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP5193480U 1980-04-18 1980-04-18 Expired JPS6141229Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5193480U JPS6141229Y2 (enrdf_load_stackoverflow) 1980-04-18 1980-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5193480U JPS6141229Y2 (enrdf_load_stackoverflow) 1980-04-18 1980-04-18

Publications (2)

Publication Number Publication Date
JPS56155446U true JPS56155446U (enrdf_load_stackoverflow) 1981-11-20
JPS6141229Y2 JPS6141229Y2 (enrdf_load_stackoverflow) 1986-11-25

Family

ID=29646815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5193480U Expired JPS6141229Y2 (enrdf_load_stackoverflow) 1980-04-18 1980-04-18

Country Status (1)

Country Link
JP (1) JPS6141229Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6141229Y2 (enrdf_load_stackoverflow) 1986-11-25

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