JPS5615147B2 - - Google Patents

Info

Publication number
JPS5615147B2
JPS5615147B2 JP12785672A JP12785672A JPS5615147B2 JP S5615147 B2 JPS5615147 B2 JP S5615147B2 JP 12785672 A JP12785672 A JP 12785672A JP 12785672 A JP12785672 A JP 12785672A JP S5615147 B2 JPS5615147 B2 JP S5615147B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12785672A
Other languages
Japanese (ja)
Other versions
JPS4984589A (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12785672A priority Critical patent/JPS5615147B2/ja
Publication of JPS4984589A publication Critical patent/JPS4984589A/ja
Publication of JPS5615147B2 publication Critical patent/JPS5615147B2/ja
Expired legal-status Critical Current

Links

JP12785672A 1972-12-19 1972-12-19 Expired JPS5615147B2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12785672A JPS5615147B2 (xx) 1972-12-19 1972-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12785672A JPS5615147B2 (xx) 1972-12-19 1972-12-19

Publications (2)

Publication Number Publication Date
JPS4984589A JPS4984589A (xx) 1974-08-14
JPS5615147B2 true JPS5615147B2 (xx) 1981-04-08

Family

ID=14970346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12785672A Expired JPS5615147B2 (xx) 1972-12-19 1972-12-19

Country Status (1)

Country Link
JP (1) JPS5615147B2 (xx)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214378A (en) * 1975-07-25 1977-02-03 Agency Of Ind Science & Technol Method for production of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1289650A (xx) * 1969-09-18 1972-09-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1289650A (xx) * 1969-09-18 1972-09-20

Also Published As

Publication number Publication date
JPS4984589A (xx) 1974-08-14

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