JPS5615137B2 - - Google Patents
Info
- Publication number
- JPS5615137B2 JPS5615137B2 JP1008573A JP1008573A JPS5615137B2 JP S5615137 B2 JPS5615137 B2 JP S5615137B2 JP 1008573 A JP1008573 A JP 1008573A JP 1008573 A JP1008573 A JP 1008573A JP S5615137 B2 JPS5615137 B2 JP S5615137B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1008573A JPS5615137B2 (en) | 1973-01-24 | 1973-01-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1008573A JPS5615137B2 (en) | 1973-01-24 | 1973-01-24 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57002959A Division JPS57202743A (en) | 1982-01-11 | 1982-01-11 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4998964A JPS4998964A (en) | 1974-09-19 |
JPS5615137B2 true JPS5615137B2 (en) | 1981-04-08 |
Family
ID=11740489
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1008573A Expired JPS5615137B2 (en) | 1973-01-24 | 1973-01-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5615137B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53121466A (en) * | 1977-03-31 | 1978-10-23 | Toshiba Corp | Manufacture for semiconductor device |
JPS58176930A (en) * | 1982-04-12 | 1983-10-17 | Yukio Yasuda | Manufacture of semiconductor device |
EP0499979A3 (en) | 1991-02-16 | 1993-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device |
JPH0837183A (en) * | 1995-01-19 | 1996-02-06 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3328210A (en) * | 1964-10-26 | 1967-06-27 | North American Aviation Inc | Method of treating semiconductor device by ionic bombardment |
-
1973
- 1973-01-24 JP JP1008573A patent/JPS5615137B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3328210A (en) * | 1964-10-26 | 1967-06-27 | North American Aviation Inc | Method of treating semiconductor device by ionic bombardment |
Also Published As
Publication number | Publication date |
---|---|
JPS4998964A (en) | 1974-09-19 |