JPS5615137B2 - - Google Patents

Info

Publication number
JPS5615137B2
JPS5615137B2 JP1008573A JP1008573A JPS5615137B2 JP S5615137 B2 JPS5615137 B2 JP S5615137B2 JP 1008573 A JP1008573 A JP 1008573A JP 1008573 A JP1008573 A JP 1008573A JP S5615137 B2 JPS5615137 B2 JP S5615137B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1008573A
Other languages
Japanese (ja)
Other versions
JPS4998964A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1008573A priority Critical patent/JPS5615137B2/ja
Publication of JPS4998964A publication Critical patent/JPS4998964A/ja
Publication of JPS5615137B2 publication Critical patent/JPS5615137B2/ja
Expired legal-status Critical Current

Links

JP1008573A 1973-01-24 1973-01-24 Expired JPS5615137B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1008573A JPS5615137B2 (en) 1973-01-24 1973-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1008573A JPS5615137B2 (en) 1973-01-24 1973-01-24

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP57002959A Division JPS57202743A (en) 1982-01-11 1982-01-11 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS4998964A JPS4998964A (en) 1974-09-19
JPS5615137B2 true JPS5615137B2 (en) 1981-04-08

Family

ID=11740489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1008573A Expired JPS5615137B2 (en) 1973-01-24 1973-01-24

Country Status (1)

Country Link
JP (1) JPS5615137B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53121466A (en) * 1977-03-31 1978-10-23 Toshiba Corp Manufacture for semiconductor device
JPS58176930A (en) * 1982-04-12 1983-10-17 Yukio Yasuda Manufacture of semiconductor device
EP0499979A3 (en) 1991-02-16 1993-06-09 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device
JPH0837183A (en) * 1995-01-19 1996-02-06 Semiconductor Energy Lab Co Ltd Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3328210A (en) * 1964-10-26 1967-06-27 North American Aviation Inc Method of treating semiconductor device by ionic bombardment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3328210A (en) * 1964-10-26 1967-06-27 North American Aviation Inc Method of treating semiconductor device by ionic bombardment

Also Published As

Publication number Publication date
JPS4998964A (en) 1974-09-19

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