JPS56151334A - Measuring device for degree of vacuum - Google Patents

Measuring device for degree of vacuum

Info

Publication number
JPS56151334A
JPS56151334A JP5428380A JP5428380A JPS56151334A JP S56151334 A JPS56151334 A JP S56151334A JP 5428380 A JP5428380 A JP 5428380A JP 5428380 A JP5428380 A JP 5428380A JP S56151334 A JPS56151334 A JP S56151334A
Authority
JP
Japan
Prior art keywords
discharge
vacuum
vacuum bulb
measured
discharge current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5428380A
Other languages
Japanese (ja)
Inventor
Tatsuaki Niide
Kunio Miyahara
Matsuo Satake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5428380A priority Critical patent/JPS56151334A/en
Publication of JPS56151334A publication Critical patent/JPS56151334A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • High-Tension Arc-Extinguishing Switches Without Spraying Means (AREA)

Abstract

PURPOSE:To reliably detect discharge and to minimize a change in pressure, by a method wherein, through the detection of discharge, the discharge in a vacuum bulb to be measured is caused to suspend after a given period of time has elapsed. CONSTITUTION:A magnetic field generating coil 2 is activated, through a power source 4, from which the magnetic field generating coil 2 is energized, and the magnetic fields are applied around vacuum bulb 1 to be measured. With a high- voltage generating circuit 3 actuated, a control circuit 6 applies a high-voltage to one of electrodes of the vacuum bulb 1 to be measured whose contact is caused to part. A magnetron discharge is generated in the vacuum bulb 1, and is detected by means of a discharge current measurement circuit 5. The signal is sent to a control circuit 6, and causes the high-voltage generating circuit 3 to suspend working after a delay time, during which a discharge current is brought into a stable state, has elapsed. This finds the degree of vacuum from a discharge current value.
JP5428380A 1980-04-25 1980-04-25 Measuring device for degree of vacuum Pending JPS56151334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5428380A JPS56151334A (en) 1980-04-25 1980-04-25 Measuring device for degree of vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5428380A JPS56151334A (en) 1980-04-25 1980-04-25 Measuring device for degree of vacuum

Publications (1)

Publication Number Publication Date
JPS56151334A true JPS56151334A (en) 1981-11-24

Family

ID=12966227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5428380A Pending JPS56151334A (en) 1980-04-25 1980-04-25 Measuring device for degree of vacuum

Country Status (1)

Country Link
JP (1) JPS56151334A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4941836A (en) * 1972-08-29 1974-04-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4941836A (en) * 1972-08-29 1974-04-19

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