JPS56149444U - - Google Patents
Info
- Publication number
- JPS56149444U JPS56149444U JP4765880U JP4765880U JPS56149444U JP S56149444 U JPS56149444 U JP S56149444U JP 4765880 U JP4765880 U JP 4765880U JP 4765880 U JP4765880 U JP 4765880U JP S56149444 U JPS56149444 U JP S56149444U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4765880U JPS56149444U (en) | 1980-04-10 | 1980-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4765880U JPS56149444U (en) | 1980-04-10 | 1980-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56149444U true JPS56149444U (en) | 1981-11-10 |
Family
ID=29642647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4765880U Pending JPS56149444U (en) | 1980-04-10 | 1980-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56149444U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0246730A (en) * | 1988-08-08 | 1990-02-16 | Nec Corp | Disperser for formation of coat film |
| JP2016186985A (en) * | 2015-03-27 | 2016-10-27 | 株式会社Ｓｃｒｅｅｎホールディングス | Flow rate control method and substrate processing apparatus |
-
1980
- 1980-04-10 JP JP4765880U patent/JPS56149444U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0246730A (en) * | 1988-08-08 | 1990-02-16 | Nec Corp | Disperser for formation of coat film |
| JP2016186985A (en) * | 2015-03-27 | 2016-10-27 | 株式会社Ｓｃｒｅｅｎホールディングス | Flow rate control method and substrate processing apparatus |