JPS56146666A - Lapping device - Google Patents

Lapping device

Info

Publication number
JPS56146666A
JPS56146666A JP4811380A JP4811380A JPS56146666A JP S56146666 A JPS56146666 A JP S56146666A JP 4811380 A JP4811380 A JP 4811380A JP 4811380 A JP4811380 A JP 4811380A JP S56146666 A JPS56146666 A JP S56146666A
Authority
JP
Japan
Prior art keywords
gear
fixers
outer periphery
fixer
engages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4811380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS639943B2 (enExample
Inventor
Hatsuyuki Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUPIIDE FUAMU KK
Original Assignee
SUPIIDE FUAMU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUPIIDE FUAMU KK filed Critical SUPIIDE FUAMU KK
Priority to JP4811380A priority Critical patent/JPS56146666A/ja
Publication of JPS56146666A publication Critical patent/JPS56146666A/ja
Publication of JPS639943B2 publication Critical patent/JPS639943B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP4811380A 1980-04-14 1980-04-14 Lapping device Granted JPS56146666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4811380A JPS56146666A (en) 1980-04-14 1980-04-14 Lapping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4811380A JPS56146666A (en) 1980-04-14 1980-04-14 Lapping device

Publications (2)

Publication Number Publication Date
JPS56146666A true JPS56146666A (en) 1981-11-14
JPS639943B2 JPS639943B2 (enExample) 1988-03-03

Family

ID=12794254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4811380A Granted JPS56146666A (en) 1980-04-14 1980-04-14 Lapping device

Country Status (1)

Country Link
JP (1) JPS56146666A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62162464A (ja) * 1986-01-07 1987-07-18 Hitachi Ltd ラツピング装置
US5969521A (en) * 1996-07-18 1999-10-19 Speedfam Co., Ltd. Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space
JP2003089056A (ja) * 2001-09-12 2003-03-25 Hamai Co Ltd 被加工物厚み計測方法
US7137867B2 (en) 2005-02-25 2006-11-21 Speedfam Co., Ltd. Thickness control method and double side polisher
US7147541B2 (en) 2005-02-25 2006-12-12 Speedfam Co., Ltd. Thickness control method and double side polisher
CN113211317A (zh) * 2021-04-21 2021-08-06 名正(浙江)电子装备有限公司 测厚系统、抛光研磨机及其使用方法
KR20220101346A (ko) * 2021-01-11 2022-07-19 에스케이실트론 주식회사 랩핑 캐리어 및 이를 포함하는 랩핑 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884991A (enExample) * 1972-02-01 1973-11-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884991A (enExample) * 1972-02-01 1973-11-10

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62162464A (ja) * 1986-01-07 1987-07-18 Hitachi Ltd ラツピング装置
US5969521A (en) * 1996-07-18 1999-10-19 Speedfam Co., Ltd. Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space
JP2003089056A (ja) * 2001-09-12 2003-03-25 Hamai Co Ltd 被加工物厚み計測方法
US7137867B2 (en) 2005-02-25 2006-11-21 Speedfam Co., Ltd. Thickness control method and double side polisher
US7147541B2 (en) 2005-02-25 2006-12-12 Speedfam Co., Ltd. Thickness control method and double side polisher
KR20220101346A (ko) * 2021-01-11 2022-07-19 에스케이실트론 주식회사 랩핑 캐리어 및 이를 포함하는 랩핑 장치
CN113211317A (zh) * 2021-04-21 2021-08-06 名正(浙江)电子装备有限公司 测厚系统、抛光研磨机及其使用方法

Also Published As

Publication number Publication date
JPS639943B2 (enExample) 1988-03-03

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