JPS56141163A - High-frequency discharge tube - Google Patents

High-frequency discharge tube

Info

Publication number
JPS56141163A
JPS56141163A JP4348980A JP4348980A JPS56141163A JP S56141163 A JPS56141163 A JP S56141163A JP 4348980 A JP4348980 A JP 4348980A JP 4348980 A JP4348980 A JP 4348980A JP S56141163 A JPS56141163 A JP S56141163A
Authority
JP
Japan
Prior art keywords
electrode
hollow center
sputtering
concentrated
rectangular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4348980A
Other languages
Japanese (ja)
Inventor
Tadataka Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4348980A priority Critical patent/JPS56141163A/en
Publication of JPS56141163A publication Critical patent/JPS56141163A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/68Lamps in which the main discharge is between parts of a current-carrying guide, e.g. halo lamp

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To prevent any local attrition of an electrode, and enhance the convenience of using the electrode, by making sputtering to be developed over an extended area on the surface of the electrode without making the sputtering to be concentrated on a spot. CONSTITUTION:A second electrode is provided with a hollow center having a rectangular cross section, a rectangular hollow center 8 being prepared. One of the rectangular surfaces of the hollow center of the electrode 8 is set parallel to a magnetic field 7. Since downward Lorenzian force 6 is exerted on positive ions, sputtering is concentrated on a bottom surface 11 of the hollow center of the electrode 8. The sputtering is spread over the entire bottom surface 11 without being concentrated on a spot, because the surface of the rectangular hollow center are parallel to the magnetic field 7. A semicircular electrode 10 fitted into one half of the circular hollow center of an electrode 9, also has not any locally concentrating sputtering part 11.
JP4348980A 1980-04-04 1980-04-04 High-frequency discharge tube Pending JPS56141163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4348980A JPS56141163A (en) 1980-04-04 1980-04-04 High-frequency discharge tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4348980A JPS56141163A (en) 1980-04-04 1980-04-04 High-frequency discharge tube

Publications (1)

Publication Number Publication Date
JPS56141163A true JPS56141163A (en) 1981-11-04

Family

ID=12665121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4348980A Pending JPS56141163A (en) 1980-04-04 1980-04-04 High-frequency discharge tube

Country Status (1)

Country Link
JP (1) JPS56141163A (en)

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