JPS5614097Y2 - - Google Patents
Info
- Publication number
- JPS5614097Y2 JPS5614097Y2 JP1976097721U JP9772176U JPS5614097Y2 JP S5614097 Y2 JPS5614097 Y2 JP S5614097Y2 JP 1976097721 U JP1976097721 U JP 1976097721U JP 9772176 U JP9772176 U JP 9772176U JP S5614097 Y2 JPS5614097 Y2 JP S5614097Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976097721U JPS5614097Y2 (https=) | 1976-07-22 | 1976-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976097721U JPS5614097Y2 (https=) | 1976-07-22 | 1976-07-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5316251U JPS5316251U (https=) | 1978-02-10 |
| JPS5614097Y2 true JPS5614097Y2 (https=) | 1981-04-02 |
Family
ID=28708080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976097721U Expired JPS5614097Y2 (https=) | 1976-07-22 | 1976-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5614097Y2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6208588B2 (ja) | 2014-01-28 | 2017-10-04 | 東京エレクトロン株式会社 | 支持機構及び基板処理装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5152754Y2 (https=) * | 1973-05-04 | 1976-12-17 |
-
1976
- 1976-07-22 JP JP1976097721U patent/JPS5614097Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5316251U (https=) | 1978-02-10 |