JPS5316251U - - Google Patents

Info

Publication number
JPS5316251U
JPS5316251U JP9772176U JP9772176U JPS5316251U JP S5316251 U JPS5316251 U JP S5316251U JP 9772176 U JP9772176 U JP 9772176U JP 9772176 U JP9772176 U JP 9772176U JP S5316251 U JPS5316251 U JP S5316251U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9772176U
Other languages
Japanese (ja)
Other versions
JPS5614097Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976097721U priority Critical patent/JPS5614097Y2/ja
Publication of JPS5316251U publication Critical patent/JPS5316251U/ja
Application granted granted Critical
Publication of JPS5614097Y2 publication Critical patent/JPS5614097Y2/ja
Expired legal-status Critical Current

Links

JP1976097721U 1976-07-22 1976-07-22 Expired JPS5614097Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976097721U JPS5614097Y2 (https=) 1976-07-22 1976-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976097721U JPS5614097Y2 (https=) 1976-07-22 1976-07-22

Publications (2)

Publication Number Publication Date
JPS5316251U true JPS5316251U (https=) 1978-02-10
JPS5614097Y2 JPS5614097Y2 (https=) 1981-04-02

Family

ID=28708080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976097721U Expired JPS5614097Y2 (https=) 1976-07-22 1976-07-22

Country Status (1)

Country Link
JP (1) JPS5614097Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9803926B2 (en) 2014-01-28 2017-10-31 Tokyo Electron Limited Support mechanism and substrate processing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502049U (https=) * 1973-05-04 1975-01-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502049U (https=) * 1973-05-04 1975-01-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9803926B2 (en) 2014-01-28 2017-10-31 Tokyo Electron Limited Support mechanism and substrate processing apparatus

Also Published As

Publication number Publication date
JPS5614097Y2 (https=) 1981-04-02

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