JPS56140451U - - Google Patents
Info
- Publication number
- JPS56140451U JPS56140451U JP3981080U JP3981080U JPS56140451U JP S56140451 U JPS56140451 U JP S56140451U JP 3981080 U JP3981080 U JP 3981080U JP 3981080 U JP3981080 U JP 3981080U JP S56140451 U JPS56140451 U JP S56140451U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Accessory Devices And Overall Control Thereof (AREA)
- Controlling Sheets Or Webs (AREA)
- Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980039810U JPS63450Y2 (ko) | 1980-03-26 | 1980-03-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980039810U JPS63450Y2 (ko) | 1980-03-26 | 1980-03-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56140451U true JPS56140451U (ko) | 1981-10-23 |
JPS63450Y2 JPS63450Y2 (ko) | 1988-01-07 |
Family
ID=29635249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1980039810U Expired JPS63450Y2 (ko) | 1980-03-26 | 1980-03-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63450Y2 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100772740B1 (ko) | 2002-11-28 | 2007-11-01 | 동경 엘렉트론 주식회사 | 플라즈마 처리 용기 내부재 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53142812U (ko) * | 1977-04-18 | 1978-11-11 | ||
JPS546496U (ko) * | 1977-06-17 | 1979-01-17 | ||
JPS54103910U (ko) * | 1977-12-28 | 1979-07-21 |
-
1980
- 1980-03-26 JP JP1980039810U patent/JPS63450Y2/ja not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53142812U (ko) * | 1977-04-18 | 1978-11-11 | ||
JPS546496U (ko) * | 1977-06-17 | 1979-01-17 | ||
JPS54103910U (ko) * | 1977-12-28 | 1979-07-21 |
Also Published As
Publication number | Publication date |
---|---|
JPS63450Y2 (ko) | 1988-01-07 |