JPS56140451U - - Google Patents

Info

Publication number
JPS56140451U
JPS56140451U JP3981080U JP3981080U JPS56140451U JP S56140451 U JPS56140451 U JP S56140451U JP 3981080 U JP3981080 U JP 3981080U JP 3981080 U JP3981080 U JP 3981080U JP S56140451 U JPS56140451 U JP S56140451U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3981080U
Other languages
Japanese (ja)
Other versions
JPS63450Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980039810U priority Critical patent/JPS63450Y2/ja
Publication of JPS56140451U publication Critical patent/JPS56140451U/ja
Application granted granted Critical
Publication of JPS63450Y2 publication Critical patent/JPS63450Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Accessory Devices And Overall Control Thereof (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
JP1980039810U 1980-03-26 1980-03-26 Expired JPS63450Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980039810U JPS63450Y2 (ko) 1980-03-26 1980-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980039810U JPS63450Y2 (ko) 1980-03-26 1980-03-26

Publications (2)

Publication Number Publication Date
JPS56140451U true JPS56140451U (ko) 1981-10-23
JPS63450Y2 JPS63450Y2 (ko) 1988-01-07

Family

ID=29635249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980039810U Expired JPS63450Y2 (ko) 1980-03-26 1980-03-26

Country Status (1)

Country Link
JP (1) JPS63450Y2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100772740B1 (ko) 2002-11-28 2007-11-01 동경 엘렉트론 주식회사 플라즈마 처리 용기 내부재

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53142812U (ko) * 1977-04-18 1978-11-11
JPS546496U (ko) * 1977-06-17 1979-01-17
JPS54103910U (ko) * 1977-12-28 1979-07-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53142812U (ko) * 1977-04-18 1978-11-11
JPS546496U (ko) * 1977-06-17 1979-01-17
JPS54103910U (ko) * 1977-12-28 1979-07-21

Also Published As

Publication number Publication date
JPS63450Y2 (ko) 1988-01-07

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