JPS56140451U - - Google Patents

Info

Publication number
JPS56140451U
JPS56140451U JP3981080U JP3981080U JPS56140451U JP S56140451 U JPS56140451 U JP S56140451U JP 3981080 U JP3981080 U JP 3981080U JP 3981080 U JP3981080 U JP 3981080U JP S56140451 U JPS56140451 U JP S56140451U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3981080U
Other languages
Japanese (ja)
Other versions
JPS63450Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980039810U priority Critical patent/JPS63450Y2/ja
Publication of JPS56140451U publication Critical patent/JPS56140451U/ja
Application granted granted Critical
Publication of JPS63450Y2 publication Critical patent/JPS63450Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Accessory Devices And Overall Control Thereof (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
JP1980039810U 1980-03-26 1980-03-26 Expired JPS63450Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980039810U JPS63450Y2 (enrdf_load_stackoverflow) 1980-03-26 1980-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980039810U JPS63450Y2 (enrdf_load_stackoverflow) 1980-03-26 1980-03-26

Publications (2)

Publication Number Publication Date
JPS56140451U true JPS56140451U (enrdf_load_stackoverflow) 1981-10-23
JPS63450Y2 JPS63450Y2 (enrdf_load_stackoverflow) 1988-01-07

Family

ID=29635249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980039810U Expired JPS63450Y2 (enrdf_load_stackoverflow) 1980-03-26 1980-03-26

Country Status (1)

Country Link
JP (1) JPS63450Y2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7147749B2 (en) 2002-09-30 2006-12-12 Tokyo Electron Limited Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system
US7166200B2 (en) 2002-09-30 2007-01-23 Tokyo Electron Limited Method and apparatus for an improved upper electrode plate in a plasma processing system
US7780786B2 (en) 2002-11-28 2010-08-24 Tokyo Electron Limited Internal member of a plasma processing vessel
JP4597972B2 (ja) 2003-03-31 2010-12-15 東京エレクトロン株式会社 処理部材上に隣接するコーティングを接合する方法。
US7552521B2 (en) 2004-12-08 2009-06-30 Tokyo Electron Limited Method and apparatus for improved baffle plate
US7601242B2 (en) 2005-01-11 2009-10-13 Tokyo Electron Limited Plasma processing system and baffle assembly for use in plasma processing system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53142812U (enrdf_load_stackoverflow) * 1977-04-18 1978-11-11
JPS546496U (enrdf_load_stackoverflow) * 1977-06-17 1979-01-17
JPS54103910U (enrdf_load_stackoverflow) * 1977-12-28 1979-07-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53142812U (enrdf_load_stackoverflow) * 1977-04-18 1978-11-11
JPS546496U (enrdf_load_stackoverflow) * 1977-06-17 1979-01-17
JPS54103910U (enrdf_load_stackoverflow) * 1977-12-28 1979-07-21

Also Published As

Publication number Publication date
JPS63450Y2 (enrdf_load_stackoverflow) 1988-01-07

Similar Documents

Publication Publication Date Title
FR2474309B1 (enrdf_load_stackoverflow)
DE3152453A1 (enrdf_load_stackoverflow)
CH636493A5 (enrdf_load_stackoverflow)
DE3152566T1 (enrdf_load_stackoverflow)
FR2474136B1 (enrdf_load_stackoverflow)
CH655403B (enrdf_load_stackoverflow)
FR2474101B1 (enrdf_load_stackoverflow)
FR2474195B1 (enrdf_load_stackoverflow)
CH660829GA3 (enrdf_load_stackoverflow)
FR2473037B1 (enrdf_load_stackoverflow)
CH655603B (enrdf_load_stackoverflow)
FR2473431B1 (enrdf_load_stackoverflow)
CH657201B (enrdf_load_stackoverflow)
FR2486776B3 (enrdf_load_stackoverflow)
FR2473488B1 (enrdf_load_stackoverflow)
FR2473733B1 (enrdf_load_stackoverflow)
FR2473436B1 (enrdf_load_stackoverflow)
FR2472958B1 (enrdf_load_stackoverflow)
FR2473561B1 (enrdf_load_stackoverflow)
CH655450B (enrdf_load_stackoverflow)
FR2474255B1 (enrdf_load_stackoverflow)
FR2485027B1 (enrdf_load_stackoverflow)
FR2473924B1 (enrdf_load_stackoverflow)
FR2473532B1 (enrdf_load_stackoverflow)
FR2457100B1 (enrdf_load_stackoverflow)