JPS56138202A - Optical apparatus - Google Patents
Optical apparatusInfo
- Publication number
- JPS56138202A JPS56138202A JP2323681A JP2323681A JPS56138202A JP S56138202 A JPS56138202 A JP S56138202A JP 2323681 A JP2323681 A JP 2323681A JP 2323681 A JP2323681 A JP 2323681A JP S56138202 A JPS56138202 A JP S56138202A
- Authority
- JP
- Japan
- Prior art keywords
- cube corner
- lambda
- plate
- uncoated
- polarising
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8005947 | 1980-02-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56138202A true JPS56138202A (en) | 1981-10-28 |
JPH045922B2 JPH045922B2 (ja) | 1992-02-04 |
Family
ID=10511565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2323681A Granted JPS56138202A (en) | 1980-02-21 | 1981-02-20 | Optical apparatus |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0036251A3 (ja) |
JP (1) | JPS56138202A (ja) |
GB (1) | GB2070276B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58225301A (ja) * | 1982-06-24 | 1983-12-27 | Yokogawa Hokushin Electric Corp | 光学式変位測定装置 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3404963C2 (de) * | 1984-02-11 | 1986-09-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Laser-Interferometer zur Längenmessung |
GB2203259A (en) * | 1987-02-26 | 1988-10-12 | Plessey Co Plc | Polarisation rotator associated with reflective surface |
GB2306654A (en) * | 1995-10-31 | 1997-05-07 | Rank Taylor Hobson Ltd | Surface measuring apparatus |
GB2389896B (en) * | 2002-03-15 | 2005-10-12 | Jolyon Defreitas | Compact interferometer for measurement of angular displacement |
US7009711B2 (en) | 2002-04-11 | 2006-03-07 | Zygo Corporation | Retroreflector coating for an interferometer |
US7382466B2 (en) | 2002-04-11 | 2008-06-03 | Zygo Corporation | Coating for reflective optical components |
US7327465B2 (en) | 2003-06-19 | 2008-02-05 | Zygo Corporation | Compensation for effects of beam misalignments in interferometer metrology systems |
US7286240B2 (en) | 2003-06-19 | 2007-10-23 | Zygo Corporation | Compensation for geometric effects of beam misalignments in plane mirror interferometer metrology systems |
WO2005022078A1 (en) * | 2003-08-27 | 2005-03-10 | The University Of Queensland | Method and apparatus for precision measurement of phase shifts |
US7327466B2 (en) | 2003-11-03 | 2008-02-05 | Zygo Corporation | Multi-corner retroreflector |
US7298493B2 (en) | 2004-06-30 | 2007-11-20 | Zygo Corporation | Interferometric optical assemblies and systems including interferometric optical assemblies |
US7489407B2 (en) | 2004-10-06 | 2009-02-10 | Zygo Corporation | Error correction in interferometry systems |
WO2006102234A2 (en) | 2005-03-18 | 2006-09-28 | Zygo Corporation | Multi-axis interferometer with procedure and data processing for mirror mapping |
GB2429291B (en) | 2005-08-18 | 2008-08-20 | Taylor Hobson Ltd | A metrological apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5147344A (ja) * | 1974-10-21 | 1976-04-22 | Hitachi Ltd |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1085350B (de) * | 1957-07-02 | 1960-07-14 | Leitz Ernst Gmbh | Interferometer |
GB1065226A (en) * | 1964-06-01 | 1967-04-12 | Kearney & Trecker Corp | Length measuring instrument |
FR1450299A (fr) * | 1965-10-19 | 1966-05-06 | Cutler Hammer Inc | Systèmes interférométriques de jaugeage |
US3434787A (en) * | 1965-11-15 | 1969-03-25 | Optomechanisms Inc | Double axes interferometer |
US3601490A (en) * | 1966-12-30 | 1971-08-24 | Keuffel & Esser Co | Laser interferometer |
DE2127483A1 (de) * | 1971-06-03 | 1972-12-14 | Leitz Ernst Gmbh | Verfahren zur interferentiellen Messung von Langen, Winkeln, Gangunter schieden oder Geschwindigkeiten |
-
1981
- 1981-02-13 GB GB8104643A patent/GB2070276B/en not_active Expired
- 1981-02-19 EP EP81300698A patent/EP0036251A3/en not_active Withdrawn
- 1981-02-20 JP JP2323681A patent/JPS56138202A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5147344A (ja) * | 1974-10-21 | 1976-04-22 | Hitachi Ltd |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58225301A (ja) * | 1982-06-24 | 1983-12-27 | Yokogawa Hokushin Electric Corp | 光学式変位測定装置 |
Also Published As
Publication number | Publication date |
---|---|
GB2070276A (en) | 1981-09-03 |
EP0036251A2 (en) | 1981-09-23 |
EP0036251A3 (en) | 1986-02-05 |
JPH045922B2 (ja) | 1992-02-04 |
GB2070276B (en) | 1983-10-12 |
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