JPS561343A - Semiconductor sensor - Google Patents
Semiconductor sensorInfo
- Publication number
- JPS561343A JPS561343A JP7743379A JP7743379A JPS561343A JP S561343 A JPS561343 A JP S561343A JP 7743379 A JP7743379 A JP 7743379A JP 7743379 A JP7743379 A JP 7743379A JP S561343 A JPS561343 A JP S561343A
- Authority
- JP
- Japan
- Prior art keywords
- ultra
- film
- corpuscular
- diffused resistor
- semiconductor sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE: To improve the sensitivity or the like of a semiconductor sensor by providing an ultra-corpuscular film and a heating means for it.
CONSTITUTION: An ultra-corpuscular film 7' of tin oxide is provided on a gate oxide 6 of a transistor 11, and a diffused resistor 4 for heating the ultra-corpuscular film 7' is provided in a silicon substrate 1 as near to the film 7' as possible. A voltage is applied across electrodes 4' and 4" to make the diffused resistor 4 hot in order to heat the ultra-corpuscular film 7'. Thus, the ultra-corpuscular film 7' can be efficiently heated, and using ultra-corpuscles permits the device to highly sensitively react to gases and steam, so that the sensitivity can be improved. Noreover, since a diffused resistor 5 for measuring the temperature can be arranged near the ultra- corpuscular film 7', its temperature can be accurately measured.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7743379A JPS561343A (en) | 1979-06-18 | 1979-06-18 | Semiconductor sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7743379A JPS561343A (en) | 1979-06-18 | 1979-06-18 | Semiconductor sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS561343A true JPS561343A (en) | 1981-01-09 |
Family
ID=13633866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7743379A Pending JPS561343A (en) | 1979-06-18 | 1979-06-18 | Semiconductor sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS561343A (en) |
-
1979
- 1979-06-18 JP JP7743379A patent/JPS561343A/en active Pending
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