JPS5613112Y2 - - Google Patents
Info
- Publication number
- JPS5613112Y2 JPS5613112Y2 JP1976107034U JP10703476U JPS5613112Y2 JP S5613112 Y2 JPS5613112 Y2 JP S5613112Y2 JP 1976107034 U JP1976107034 U JP 1976107034U JP 10703476 U JP10703476 U JP 10703476U JP S5613112 Y2 JPS5613112 Y2 JP S5613112Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976107034U JPS5613112Y2 ( ) | 1976-08-12 | 1976-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976107034U JPS5613112Y2 ( ) | 1976-08-12 | 1976-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5325992U JPS5325992U ( ) | 1978-03-04 |
| JPS5613112Y2 true JPS5613112Y2 ( ) | 1981-03-26 |
Family
ID=28717093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976107034U Expired JPS5613112Y2 ( ) | 1976-08-12 | 1976-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5613112Y2 ( ) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE512747T1 (de) * | 2005-10-31 | 2011-07-15 | Advanced Laser Separation Internat Alsi B V | Verfahren zum formen eines oder mehrerer getrennten ritze in einer oberfläche eines substrats |
| KR100969946B1 (ko) * | 2007-07-24 | 2010-07-14 | 주식회사 이오테크닉스 | 레이저 빔 분할을 이용한 레이저 가공 장치 및 방법 |
-
1976
- 1976-08-12 JP JP1976107034U patent/JPS5613112Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5325992U ( ) | 1978-03-04 |