JPS56130939A - Conveying device - Google Patents

Conveying device

Info

Publication number
JPS56130939A
JPS56130939A JP3428980A JP3428980A JPS56130939A JP S56130939 A JPS56130939 A JP S56130939A JP 3428980 A JP3428980 A JP 3428980A JP 3428980 A JP3428980 A JP 3428980A JP S56130939 A JPS56130939 A JP S56130939A
Authority
JP
Japan
Prior art keywords
base
belt
substrate
conveyed
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3428980A
Other languages
Japanese (ja)
Inventor
Yukihisa Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP3428980A priority Critical patent/JPS56130939A/en
Publication of JPS56130939A publication Critical patent/JPS56130939A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

PURPOSE:To effectively and readily communicate a semiconductor substrate by a conveying device by reciprocating an inspecting base between two belts installed in parallel with one another. CONSTITUTION:A semiconductor substrate 2 conveyed by a belt 1 in a direction as designated by an arrow A is stopped moving with projections 3a, 3b at the front of an inspecting base 3. When the base 3 is moved at a slightly slower speed than the conveying speed of the belt 1 in a direction as designated by an arrow A, the substrate 2 is always conveyed in the state to be urged to the projections 3a, 3b while the belt 1 of the conveying action is larger than the substrate, and even if the base 3 is conveyed with larger conveying force, it is conveyed at the conveying speed of the base in the direction as designated by an arrow A. When the base 3 is removed of the belt region, the substrate 2 is enclosed by the projections 3a-3d fixedly. Even if the base 3 and the belt 1 are moved in opposite direction, the substrate 2 can be readily communicated similarly.
JP3428980A 1980-03-17 1980-03-17 Conveying device Pending JPS56130939A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3428980A JPS56130939A (en) 1980-03-17 1980-03-17 Conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3428980A JPS56130939A (en) 1980-03-17 1980-03-17 Conveying device

Publications (1)

Publication Number Publication Date
JPS56130939A true JPS56130939A (en) 1981-10-14

Family

ID=12409988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3428980A Pending JPS56130939A (en) 1980-03-17 1980-03-17 Conveying device

Country Status (1)

Country Link
JP (1) JPS56130939A (en)

Similar Documents

Publication Publication Date Title
ATE48068T1 (en) DOUGH HANDLER.
ES383949A1 (en) Conveyors
ES510362A0 (en) "IMPROVEMENTS IN DEVICES TO INDIVIDUALLY SEPARATE PLANE OBJECTS".
JPS5313998A (en) Conveyor of cards
SE8403990D0 (en) PROCEDURE AND DEVICE FOR FEEDING AND SORTING OF ARTICLES
GR3003765T3 (en)
GB926788A (en) Improvements in or relating to hold-down devices for labelling machines
ES456470A1 (en) Conveyance of flat objects
JPS56130939A (en) Conveying device
JPS5719217A (en) Transport material inverting device
ES2048848T3 (en) ARTICLE FEEDING APPARATUS.
ES8104766A1 (en) Method of redirecting article in mutual* continuous order and its device
JPS57160811A (en) Belt transport apparatus
JPS51113972A (en) Conveyor
JPS6413340A (en) Wafer conveying device
FR2466195B1 (en) DEVICE FOR LATERAL MOVEMENT OF BAKERY ITEMS, ESPECIALLY BREADS, ON A CONVEYOR BELT
JPS5425076A (en) Device for driving belt conveyor
WO1990006219A3 (en) Device and process for the production of slabs of thermoplastic material
JPS57126342A (en) Belt pushing device
JPS54129668A (en) Transport apparatus
JPS5229074A (en) Device for converting direction of carrying article between conveyors
JPS52121279A (en) Vertical conveyor
JPS5247266A (en) Apparatus for orientating articles in the same direction
FR2274535A1 (en) Conveyor for flat objects, particularly paper sheets - has toothed belts on toothed pulleys moving just above a polished surface
JPS5295480A (en) Roller conveyor