JPS5612837Y2 - - Google Patents

Info

Publication number
JPS5612837Y2
JPS5612837Y2 JP1976038999U JP3899976U JPS5612837Y2 JP S5612837 Y2 JPS5612837 Y2 JP S5612837Y2 JP 1976038999 U JP1976038999 U JP 1976038999U JP 3899976 U JP3899976 U JP 3899976U JP S5612837 Y2 JPS5612837 Y2 JP S5612837Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976038999U
Other languages
Japanese (ja)
Other versions
JPS52130679U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976038999U priority Critical patent/JPS5612837Y2/ja
Publication of JPS52130679U publication Critical patent/JPS52130679U/ja
Application granted granted Critical
Publication of JPS5612837Y2 publication Critical patent/JPS5612837Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1976038999U 1976-03-31 1976-03-31 Expired JPS5612837Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976038999U JPS5612837Y2 (cs) 1976-03-31 1976-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976038999U JPS5612837Y2 (cs) 1976-03-31 1976-03-31

Publications (2)

Publication Number Publication Date
JPS52130679U JPS52130679U (cs) 1977-10-04
JPS5612837Y2 true JPS5612837Y2 (cs) 1981-03-25

Family

ID=28498170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976038999U Expired JPS5612837Y2 (cs) 1976-03-31 1976-03-31

Country Status (1)

Country Link
JP (1) JPS5612837Y2 (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5471992A (en) * 1977-11-18 1979-06-08 Cho Lsi Gijutsu Kenkyu Kumiai Electron beam shaping aperture mask
JPS55163840A (en) * 1979-06-06 1980-12-20 Fujitsu Ltd Electron beam exposure device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321990B2 (cs) * 1973-11-26 1978-07-06

Also Published As

Publication number Publication date
JPS52130679U (cs) 1977-10-04

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