JPS52127772U - - Google Patents

Info

Publication number
JPS52127772U
JPS52127772U JP3651076U JP3651076U JPS52127772U JP S52127772 U JPS52127772 U JP S52127772U JP 3651076 U JP3651076 U JP 3651076U JP 3651076 U JP3651076 U JP 3651076U JP S52127772 U JPS52127772 U JP S52127772U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3651076U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3651076U priority Critical patent/JPS52127772U/ja
Publication of JPS52127772U publication Critical patent/JPS52127772U/ja
Pending legal-status Critical Current

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Landscapes

  • Electron Beam Exposure (AREA)
JP3651076U 1976-03-26 1976-03-26 Pending JPS52127772U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3651076U JPS52127772U (cs) 1976-03-26 1976-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3651076U JPS52127772U (cs) 1976-03-26 1976-03-26

Publications (1)

Publication Number Publication Date
JPS52127772U true JPS52127772U (cs) 1977-09-28

Family

ID=28495802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3651076U Pending JPS52127772U (cs) 1976-03-26 1976-03-26

Country Status (1)

Country Link
JP (1) JPS52127772U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020174084A (ja) * 2019-04-09 2020-10-22 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置及びアパーチャ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503078U (cs) * 1973-05-07 1975-01-13
JPS5084176A (cs) * 1973-11-26 1975-07-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503078U (cs) * 1973-05-07 1975-01-13
JPS5084176A (cs) * 1973-11-26 1975-07-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020174084A (ja) * 2019-04-09 2020-10-22 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置及びアパーチャ

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