JPS56121565U - - Google Patents
Info
- Publication number
- JPS56121565U JPS56121565U JP1981006579U JP657981U JPS56121565U JP S56121565 U JPS56121565 U JP S56121565U JP 1981006579 U JP1981006579 U JP 1981006579U JP 657981 U JP657981 U JP 657981U JP S56121565 U JPS56121565 U JP S56121565U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981006579U JPS639406Y2 (en) | 1981-01-22 | 1981-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981006579U JPS639406Y2 (en) | 1981-01-22 | 1981-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56121565U true JPS56121565U (en) | 1981-09-16 |
| JPS639406Y2 JPS639406Y2 (en) | 1988-03-19 |
Family
ID=29603249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981006579U Expired JPS639406Y2 (en) | 1981-01-22 | 1981-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS639406Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001507997A (en) * | 1997-01-13 | 2001-06-19 | ローデル ホールディングス インコーポレイテッド | Polymer polishing pad having surface pattern formed by light exposure plate making and related method |
| JP4996767B1 (en) * | 2010-11-12 | 2012-08-08 | 株式会社Ｆｉｌｗｅｌ | Manufacturing method of holding material for single-side polishing |
| JP2019111636A (en) * | 2017-12-26 | 2019-07-11 | 富士紡ホールディングス株式会社 | Polishing pad manufacturing method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5363695A (en) * | 1976-11-17 | 1978-06-07 | Hitachi Ltd | Method of finish polishing |
| JPS5373067A (en) * | 1976-12-13 | 1978-06-29 | Nippon Telegr & Teleph Corp <Ntt> | Polisher |
| JPS5531582A (en) * | 1978-08-15 | 1980-03-05 | Ibm | Free polishing device |
-
1981
- 1981-01-22 JP JP1981006579U patent/JPS639406Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5363695A (en) * | 1976-11-17 | 1978-06-07 | Hitachi Ltd | Method of finish polishing |
| JPS5373067A (en) * | 1976-12-13 | 1978-06-29 | Nippon Telegr & Teleph Corp <Ntt> | Polisher |
| JPS5531582A (en) * | 1978-08-15 | 1980-03-05 | Ibm | Free polishing device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001507997A (en) * | 1997-01-13 | 2001-06-19 | ローデル ホールディングス インコーポレイテッド | Polymer polishing pad having surface pattern formed by light exposure plate making and related method |
| JP4996767B1 (en) * | 2010-11-12 | 2012-08-08 | 株式会社Ｆｉｌｗｅｌ | Manufacturing method of holding material for single-side polishing |
| JP2019111636A (en) * | 2017-12-26 | 2019-07-11 | 富士紡ホールディングス株式会社 | Polishing pad manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS639406Y2 (en) | 1988-03-19 |