JPS5611932B2 - - Google Patents

Info

Publication number
JPS5611932B2
JPS5611932B2 JP9901772A JP9901772A JPS5611932B2 JP S5611932 B2 JPS5611932 B2 JP S5611932B2 JP 9901772 A JP9901772 A JP 9901772A JP 9901772 A JP9901772 A JP 9901772A JP S5611932 B2 JPS5611932 B2 JP S5611932B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9901772A
Other languages
Japanese (ja)
Other versions
JPS4958771A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9901772A priority Critical patent/JPS5611932B2/ja
Publication of JPS4958771A publication Critical patent/JPS4958771A/ja
Publication of JPS5611932B2 publication Critical patent/JPS5611932B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9901772A 1972-10-04 1972-10-04 Expired JPS5611932B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9901772A JPS5611932B2 (enrdf_load_stackoverflow) 1972-10-04 1972-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9901772A JPS5611932B2 (enrdf_load_stackoverflow) 1972-10-04 1972-10-04

Publications (2)

Publication Number Publication Date
JPS4958771A JPS4958771A (enrdf_load_stackoverflow) 1974-06-07
JPS5611932B2 true JPS5611932B2 (enrdf_load_stackoverflow) 1981-03-18

Family

ID=14235379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9901772A Expired JPS5611932B2 (enrdf_load_stackoverflow) 1972-10-04 1972-10-04

Country Status (1)

Country Link
JP (1) JPS5611932B2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS4958771A (enrdf_load_stackoverflow) 1974-06-07

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