JPS4958771A - - Google Patents

Info

Publication number
JPS4958771A
JPS4958771A JP47099017A JP9901772A JPS4958771A JP S4958771 A JPS4958771 A JP S4958771A JP 47099017 A JP47099017 A JP 47099017A JP 9901772 A JP9901772 A JP 9901772A JP S4958771 A JPS4958771 A JP S4958771A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47099017A
Other languages
Japanese (ja)
Other versions
JPS5611932B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9901772A priority Critical patent/JPS5611932B2/ja
Publication of JPS4958771A publication Critical patent/JPS4958771A/ja
Publication of JPS5611932B2 publication Critical patent/JPS5611932B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9901772A 1972-10-04 1972-10-04 Expired JPS5611932B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9901772A JPS5611932B2 (enrdf_load_stackoverflow) 1972-10-04 1972-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9901772A JPS5611932B2 (enrdf_load_stackoverflow) 1972-10-04 1972-10-04

Publications (2)

Publication Number Publication Date
JPS4958771A true JPS4958771A (enrdf_load_stackoverflow) 1974-06-07
JPS5611932B2 JPS5611932B2 (enrdf_load_stackoverflow) 1981-03-18

Family

ID=14235379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9901772A Expired JPS5611932B2 (enrdf_load_stackoverflow) 1972-10-04 1972-10-04

Country Status (1)

Country Link
JP (1) JPS5611932B2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5611932B2 (enrdf_load_stackoverflow) 1981-03-18

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