JPS5611752B2 - - Google Patents

Info

Publication number
JPS5611752B2
JPS5611752B2 JP11448173A JP11448173A JPS5611752B2 JP S5611752 B2 JPS5611752 B2 JP S5611752B2 JP 11448173 A JP11448173 A JP 11448173A JP 11448173 A JP11448173 A JP 11448173A JP S5611752 B2 JPS5611752 B2 JP S5611752B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11448173A
Other languages
Japanese (ja)
Other versions
JPS5064184A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11448173A priority Critical patent/JPS5611752B2/ja
Publication of JPS5064184A publication Critical patent/JPS5064184A/ja
Publication of JPS5611752B2 publication Critical patent/JPS5611752B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Light Receiving Elements (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
JP11448173A 1973-10-12 1973-10-12 Expired JPS5611752B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11448173A JPS5611752B2 (cs) 1973-10-12 1973-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11448173A JPS5611752B2 (cs) 1973-10-12 1973-10-12

Publications (2)

Publication Number Publication Date
JPS5064184A JPS5064184A (cs) 1975-05-31
JPS5611752B2 true JPS5611752B2 (cs) 1981-03-17

Family

ID=14638809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11448173A Expired JPS5611752B2 (cs) 1973-10-12 1973-10-12

Country Status (1)

Country Link
JP (1) JPS5611752B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002348658A (ja) * 2001-05-23 2002-12-04 Anelva Corp 蒸着源並びにそれを用いた薄膜形成方法及び形成装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53108044A (en) * 1977-03-03 1978-09-20 Hattori Isao Evaporation source for vacuum evaporation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5621069B2 (cs) * 1973-09-11 1981-05-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002348658A (ja) * 2001-05-23 2002-12-04 Anelva Corp 蒸着源並びにそれを用いた薄膜形成方法及び形成装置

Also Published As

Publication number Publication date
JPS5064184A (cs) 1975-05-31

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