JPS5064184A - - Google Patents

Info

Publication number
JPS5064184A
JPS5064184A JP48114481A JP11448173A JPS5064184A JP S5064184 A JPS5064184 A JP S5064184A JP 48114481 A JP48114481 A JP 48114481A JP 11448173 A JP11448173 A JP 11448173A JP S5064184 A JPS5064184 A JP S5064184A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48114481A
Other languages
Japanese (ja)
Other versions
JPS5611752B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11448173A priority Critical patent/JPS5611752B2/ja
Publication of JPS5064184A publication Critical patent/JPS5064184A/ja
Publication of JPS5611752B2 publication Critical patent/JPS5611752B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Light Receiving Elements (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP11448173A 1973-10-12 1973-10-12 Expired JPS5611752B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11448173A JPS5611752B2 (cs) 1973-10-12 1973-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11448173A JPS5611752B2 (cs) 1973-10-12 1973-10-12

Publications (2)

Publication Number Publication Date
JPS5064184A true JPS5064184A (cs) 1975-05-31
JPS5611752B2 JPS5611752B2 (cs) 1981-03-17

Family

ID=14638809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11448173A Expired JPS5611752B2 (cs) 1973-10-12 1973-10-12

Country Status (1)

Country Link
JP (1) JPS5611752B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53108044A (en) * 1977-03-03 1978-09-20 Hattori Isao Evaporation source for vacuum evaporation

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4593008B2 (ja) * 2001-05-23 2010-12-08 キヤノンアネルバ株式会社 蒸着源並びにそれを用いた薄膜形成方法及び形成装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051982A (cs) * 1973-09-11 1975-05-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051982A (cs) * 1973-09-11 1975-05-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53108044A (en) * 1977-03-03 1978-09-20 Hattori Isao Evaporation source for vacuum evaporation

Also Published As

Publication number Publication date
JPS5611752B2 (cs) 1981-03-17

Similar Documents

Publication Publication Date Title
AR201758A1 (cs)
AU476761B2 (cs)
AU465372B2 (cs)
AR201235Q (cs)
AR201231Q (cs)
AU474593B2 (cs)
AU474511B2 (cs)
AU474838B2 (cs)
AU465453B2 (cs)
AU471343B2 (cs)
AU465434B2 (cs)
AU450229B2 (cs)
AU476714B2 (cs)
AR201229Q (cs)
AU472848B2 (cs)
AU466283B2 (cs)
AU476696B2 (cs)
AR199451A1 (cs)
AU477823B2 (cs)
AR201432A1 (cs)
AU471461B2 (cs)
AU447540B2 (cs)
AR196382A1 (cs)
AR210729A1 (cs)
AU477824B2 (cs)