JPS56113410A - Method of working groove - Google Patents
Method of working grooveInfo
- Publication number
- JPS56113410A JPS56113410A JP1658980A JP1658980A JPS56113410A JP S56113410 A JPS56113410 A JP S56113410A JP 1658980 A JP1658980 A JP 1658980A JP 1658980 A JP1658980 A JP 1658980A JP S56113410 A JPS56113410 A JP S56113410A
- Authority
- JP
- Japan
- Prior art keywords
- working groove
- working
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1658980A JPS56113410A (en) | 1980-02-15 | 1980-02-15 | Method of working groove |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1658980A JPS56113410A (en) | 1980-02-15 | 1980-02-15 | Method of working groove |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56113410A true JPS56113410A (en) | 1981-09-07 |
Family
ID=11920457
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1658980A Pending JPS56113410A (en) | 1980-02-15 | 1980-02-15 | Method of working groove |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56113410A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0287523A (en) * | 1988-09-26 | 1990-03-28 | Shin Etsu Handotai Co Ltd | Method and equipment for bevelling semiconductor wafer notch |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5249221A (en) * | 1975-10-17 | 1977-04-20 | Morita Seishinshiyo Yuugen | Method of drilling of glass to be tempered |
-
1980
- 1980-02-15 JP JP1658980A patent/JPS56113410A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5249221A (en) * | 1975-10-17 | 1977-04-20 | Morita Seishinshiyo Yuugen | Method of drilling of glass to be tempered |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0287523A (en) * | 1988-09-26 | 1990-03-28 | Shin Etsu Handotai Co Ltd | Method and equipment for bevelling semiconductor wafer notch |
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