JPS56107166A - Surfacial electrometer - Google Patents

Surfacial electrometer

Info

Publication number
JPS56107166A
JPS56107166A JP802081A JP802081A JPS56107166A JP S56107166 A JPS56107166 A JP S56107166A JP 802081 A JP802081 A JP 802081A JP 802081 A JP802081 A JP 802081A JP S56107166 A JPS56107166 A JP S56107166A
Authority
JP
Japan
Prior art keywords
charged object
detection electrode
oscillation
surfacial
oscillators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP802081A
Other languages
Japanese (ja)
Other versions
JPS6353513B2 (en
Inventor
Yasuo Nihei
Takuya Hosoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ando Electric Co Ltd
Original Assignee
Ando Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ando Electric Co Ltd filed Critical Ando Electric Co Ltd
Priority to JP802081A priority Critical patent/JPS56107166A/en
Publication of JPS56107166A publication Critical patent/JPS56107166A/en
Publication of JPS6353513B2 publication Critical patent/JPS6353513B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/16—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using capacitive devices
    • G01R15/165—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using capacitive devices measuring electrostatic potential, e.g. with electrostatic voltmeters or electrometers, when the design of the sensor is essential

Abstract

PURPOSE:To simplify a constitution by fixing a detection electrode and vibrating an oscillator provided nearby. CONSTITUTION:Oscillators 4a, 4b are arranged opposed to each other as if to hold a detection electrode 2 facing a charged object 1 at the both sides between the oscillators. In a part near the charged object 1 of the width T of each oscillation piece, the oscillation pieces 4a, 4b are set directly opposed to each other and a detection electrode 2 is so arranged as to provide its side only to a part remote from the charged object 1. Then the oscillation pieces 4a, 4b are vibrated as if they were caused to approach or become distant from the oscillation pieces 4a, 4b. In this manner, the surfacial potential of the charged object 1 is measured.
JP802081A 1981-01-23 1981-01-23 Surfacial electrometer Granted JPS56107166A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP802081A JPS56107166A (en) 1981-01-23 1981-01-23 Surfacial electrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP802081A JPS56107166A (en) 1981-01-23 1981-01-23 Surfacial electrometer

Publications (2)

Publication Number Publication Date
JPS56107166A true JPS56107166A (en) 1981-08-25
JPS6353513B2 JPS6353513B2 (en) 1988-10-24

Family

ID=11681647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP802081A Granted JPS56107166A (en) 1981-01-23 1981-01-23 Surfacial electrometer

Country Status (1)

Country Link
JP (1) JPS56107166A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213258A (en) * 1982-06-04 1983-12-12 Murata Mfg Co Ltd Detecting apparatus of surface electric potential
JP2007194126A (en) * 2006-01-20 2007-08-02 Hitachi High-Technologies Corp Scanning electron microscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213258A (en) * 1982-06-04 1983-12-12 Murata Mfg Co Ltd Detecting apparatus of surface electric potential
JPH0145873B2 (en) * 1982-06-04 1989-10-05 Murata Manufacturing Co
JP2007194126A (en) * 2006-01-20 2007-08-02 Hitachi High-Technologies Corp Scanning electron microscope
JP4616180B2 (en) * 2006-01-20 2011-01-19 株式会社日立ハイテクノロジーズ Scanning electron microscope

Also Published As

Publication number Publication date
JPS6353513B2 (en) 1988-10-24

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