JPS5610474Y2 - - Google Patents
Info
- Publication number
- JPS5610474Y2 JPS5610474Y2 JP1976033712U JP3371276U JPS5610474Y2 JP S5610474 Y2 JPS5610474 Y2 JP S5610474Y2 JP 1976033712 U JP1976033712 U JP 1976033712U JP 3371276 U JP3371276 U JP 3371276U JP S5610474 Y2 JPS5610474 Y2 JP S5610474Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976033712U JPS5610474Y2 (en:Method) | 1976-03-19 | 1976-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976033712U JPS5610474Y2 (en:Method) | 1976-03-19 | 1976-03-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52125192U JPS52125192U (en:Method) | 1977-09-22 |
| JPS5610474Y2 true JPS5610474Y2 (en:Method) | 1981-03-09 |
Family
ID=28493123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976033712U Expired JPS5610474Y2 (en:Method) | 1976-03-19 | 1976-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5610474Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2810137B2 (ja) * | 1989-08-21 | 1998-10-15 | 株式会社日立製作所 | イオンビーム加工方法 |
-
1976
- 1976-03-19 JP JP1976033712U patent/JPS5610474Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52125192U (en:Method) | 1977-09-22 |