JPS52125192U - - Google Patents

Info

Publication number
JPS52125192U
JPS52125192U JP1976033712U JP3371276U JPS52125192U JP S52125192 U JPS52125192 U JP S52125192U JP 1976033712 U JP1976033712 U JP 1976033712U JP 3371276 U JP3371276 U JP 3371276U JP S52125192 U JPS52125192 U JP S52125192U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1976033712U
Other languages
Japanese (ja)
Other versions
JPS5610474Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976033712U priority Critical patent/JPS5610474Y2/ja
Publication of JPS52125192U publication Critical patent/JPS52125192U/ja
Application granted granted Critical
Publication of JPS5610474Y2 publication Critical patent/JPS5610474Y2/ja
Expired legal-status Critical Current

Links

JP1976033712U 1976-03-19 1976-03-19 Expired JPS5610474Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976033712U JPS5610474Y2 (en:Method) 1976-03-19 1976-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976033712U JPS5610474Y2 (en:Method) 1976-03-19 1976-03-19

Publications (2)

Publication Number Publication Date
JPS52125192U true JPS52125192U (en:Method) 1977-09-22
JPS5610474Y2 JPS5610474Y2 (en:Method) 1981-03-09

Family

ID=28493123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976033712U Expired JPS5610474Y2 (en:Method) 1976-03-19 1976-03-19

Country Status (1)

Country Link
JP (1) JPS5610474Y2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0377255A (ja) * 1989-08-21 1991-04-02 Hitachi Ltd イオンビーム加工方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0377255A (ja) * 1989-08-21 1991-04-02 Hitachi Ltd イオンビーム加工方法

Also Published As

Publication number Publication date
JPS5610474Y2 (en:Method) 1981-03-09

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