JPS559947B2 - - Google Patents
Info
- Publication number
- JPS559947B2 JPS559947B2 JP1299975A JP1299975A JPS559947B2 JP S559947 B2 JPS559947 B2 JP S559947B2 JP 1299975 A JP1299975 A JP 1299975A JP 1299975 A JP1299975 A JP 1299975A JP S559947 B2 JPS559947 B2 JP S559947B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1299975A JPS5187434A (en) | 1975-01-31 | 1975-01-31 | Kibanno kuriininguhoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1299975A JPS5187434A (en) | 1975-01-31 | 1975-01-31 | Kibanno kuriininguhoho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5187434A JPS5187434A (en) | 1976-07-31 |
| JPS559947B2 true JPS559947B2 (Direct) | 1980-03-13 |
Family
ID=11820884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1299975A Granted JPS5187434A (en) | 1975-01-31 | 1975-01-31 | Kibanno kuriininguhoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5187434A (Direct) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5914549B2 (ja) * | 1980-03-03 | 1984-04-05 | 舜平 山崎 | プラズマ・クリ−ニング・エッチ法 |
| JPS61235578A (ja) * | 1986-01-06 | 1986-10-20 | Semiconductor Energy Lab Co Ltd | 反応炉内を清浄にする方法 |
-
1975
- 1975-01-31 JP JP1299975A patent/JPS5187434A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5187434A (en) | 1976-07-31 |