JPS5598822A - Wafer holding jig - Google Patents
Wafer holding jigInfo
- Publication number
- JPS5598822A JPS5598822A JP618179A JP618179A JPS5598822A JP S5598822 A JPS5598822 A JP S5598822A JP 618179 A JP618179 A JP 618179A JP 618179 A JP618179 A JP 618179A JP S5598822 A JPS5598822 A JP S5598822A
- Authority
- JP
- Japan
- Prior art keywords
- jig
- resin
- holding jig
- shaped part
- wafer holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP618179A JPS5598822A (en) | 1979-01-24 | 1979-01-24 | Wafer holding jig |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP618179A JPS5598822A (en) | 1979-01-24 | 1979-01-24 | Wafer holding jig |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5598822A true JPS5598822A (en) | 1980-07-28 |
Family
ID=11631372
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP618179A Pending JPS5598822A (en) | 1979-01-24 | 1979-01-24 | Wafer holding jig |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5598822A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57155744A (en) * | 1981-03-23 | 1982-09-25 | Hitachi Ltd | Jig for wafer |
JPS60103837U (ja) * | 1981-06-04 | 1985-07-15 | エム・セテツク株式会社 | 半導体ウエフア用カセツト |
JPS62197855U (ja) * | 1987-05-20 | 1987-12-16 | ||
JPH02500631A (ja) * | 1987-07-02 | 1990-03-01 | フロロウエア インコーポレーテツド | 剛性補強部品を埋め込んで強化されたキャリア |
-
1979
- 1979-01-24 JP JP618179A patent/JPS5598822A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57155744A (en) * | 1981-03-23 | 1982-09-25 | Hitachi Ltd | Jig for wafer |
JPS60103837U (ja) * | 1981-06-04 | 1985-07-15 | エム・セテツク株式会社 | 半導体ウエフア用カセツト |
JPS6127179Y2 (ja) * | 1981-06-04 | 1986-08-13 | ||
JPS62197855U (ja) * | 1987-05-20 | 1987-12-16 | ||
JPH02500631A (ja) * | 1987-07-02 | 1990-03-01 | フロロウエア インコーポレーテツド | 剛性補強部品を埋め込んで強化されたキャリア |
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