JPS5598693A - High vacuum rotary pump - Google Patents

High vacuum rotary pump

Info

Publication number
JPS5598693A
JPS5598693A JP372380A JP372380A JPS5598693A JP S5598693 A JPS5598693 A JP S5598693A JP 372380 A JP372380 A JP 372380A JP 372380 A JP372380 A JP 372380A JP S5598693 A JPS5598693 A JP S5598693A
Authority
JP
Japan
Prior art keywords
high vacuum
rotary pump
vacuum rotary
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP372380A
Other languages
English (en)
Japanese (ja)
Inventor
Soorujiyo Kuroodo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Publication of JPS5598693A publication Critical patent/JPS5598693A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/04—Units comprising pumps and their driving means the pump being fluid-driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Sliding-Contact Bearings (AREA)
JP372380A 1979-01-19 1980-01-18 High vacuum rotary pump Pending JPS5598693A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7901317A FR2446934A1 (fr) 1979-01-19 1979-01-19 Pompe rotative a vide eleve

Publications (1)

Publication Number Publication Date
JPS5598693A true JPS5598693A (en) 1980-07-26

Family

ID=9220954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP372380A Pending JPS5598693A (en) 1979-01-19 1980-01-18 High vacuum rotary pump

Country Status (4)

Country Link
US (1) US4332522A (US06724976-20040420-M00002.png)
JP (1) JPS5598693A (US06724976-20040420-M00002.png)
DE (1) DE3001134A1 (US06724976-20040420-M00002.png)
FR (1) FR2446934A1 (US06724976-20040420-M00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5139396A (en) * 1990-03-05 1992-08-18 Koyo Seiko Co., Ltd. Ball bearing for use in vacuum and turbo-molecular pump incorporating same

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3039196A1 (de) * 1980-10-17 1982-05-13 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur montage einer einflutigen turbomolekular-vakuumpumpe und nach diesem verfahren montierte turbomolekular-vakuumpumpe
DE3133781A1 (de) * 1981-08-26 1983-03-10 Leybold-Heraeus GmbH, 5000 Köln Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
FR2521650A1 (fr) * 1982-02-16 1983-08-19 Cit Alcatel Pompe rotative a vide eleve
US6784033B1 (en) 1984-02-15 2004-08-31 Semiconductor Energy Laboratory Co., Ltd. Method for the manufacture of an insulated gate field effect semiconductor device
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
FR2567208B1 (fr) * 1984-07-05 1988-12-09 Cit Alcatel Pompe rotative a vide eleve
US6786997B1 (en) * 1984-11-26 2004-09-07 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus
JPH0752718B2 (ja) 1984-11-26 1995-06-05 株式会社半導体エネルギー研究所 薄膜形成方法
US6230650B1 (en) 1985-10-14 2001-05-15 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD system under magnetic field
US6673722B1 (en) 1985-10-14 2004-01-06 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD system under magnetic field
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ
DE3885899D1 (de) * 1988-10-10 1994-01-05 Leybold Ag Pumpenstufe für eine Hochvakuumpumpe.
DE19933332A1 (de) 1999-07-16 2001-01-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe für den Einsatz in einem System zur Druckregelung sowie Druckregelungssystem mit einer Reibungsvakuumpumpe dieser Art
DE202006017846U1 (de) * 2006-11-23 2008-03-27 Oerlikon Leybold Vacuum Gmbh Hochvakuumpumpe
GB2489975A (en) 2011-04-14 2012-10-17 Edwards Ltd Vacuum pumping system
US20210067023A1 (en) * 2019-08-30 2021-03-04 Apple Inc. Haptic actuator including shaft coupled field member and related methods

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3131942A (en) * 1958-09-15 1964-05-05 Alsacienne Constr Meca Fluid-tight devices for rotating shafts
US3189264A (en) * 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
SU542024A1 (ru) * 1965-12-29 1977-01-05 Институт Металлургии Им.А.А.Байкова Молекул рный вакуумный насос
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2263612A1 (de) * 1972-12-27 1974-07-04 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE2409857B2 (de) * 1974-03-01 1977-03-24 Leybold-Heraeus GmbH & Co KG, 5000Köln Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
IT1032818B (it) * 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5139396A (en) * 1990-03-05 1992-08-18 Koyo Seiko Co., Ltd. Ball bearing for use in vacuum and turbo-molecular pump incorporating same

Also Published As

Publication number Publication date
FR2446934B1 (US06724976-20040420-M00002.png) 1981-05-08
FR2446934A1 (fr) 1980-08-14
US4332522A (en) 1982-06-01
DE3001134A1 (de) 1980-07-31

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