JPS559634Y2 - - Google Patents
Info
- Publication number
- JPS559634Y2 JPS559634Y2 JP1975776U JP1975776U JPS559634Y2 JP S559634 Y2 JPS559634 Y2 JP S559634Y2 JP 1975776 U JP1975776 U JP 1975776U JP 1975776 U JP1975776 U JP 1975776U JP S559634 Y2 JPS559634 Y2 JP S559634Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975776U JPS559634Y2 (en:Method) | 1976-02-20 | 1976-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975776U JPS559634Y2 (en:Method) | 1976-02-20 | 1976-02-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52111747U JPS52111747U (en:Method) | 1977-08-25 |
| JPS559634Y2 true JPS559634Y2 (en:Method) | 1980-03-03 |
Family
ID=28479803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975776U Expired JPS559634Y2 (en:Method) | 1976-02-20 | 1976-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS559634Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10378102B2 (en) | 2015-02-24 | 2019-08-13 | Ulvac, Inc. | Rotary cathode unit for magnetron sputtering apparatus |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4162954A (en) * | 1978-08-21 | 1979-07-31 | Vac-Tec Systems, Inc. | Planar magnetron sputtering device |
| JPS56152963A (en) * | 1980-04-30 | 1981-11-26 | Hitachi Ltd | Sputtering apparatus |
| JPS6180825A (ja) * | 1984-09-28 | 1986-04-24 | Hitachi Ltd | 液体処理装置 |
-
1976
- 1976-02-20 JP JP1975776U patent/JPS559634Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10378102B2 (en) | 2015-02-24 | 2019-08-13 | Ulvac, Inc. | Rotary cathode unit for magnetron sputtering apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52111747U (en:Method) | 1977-08-25 |