JPS5596162U - - Google Patents
Info
- Publication number
- JPS5596162U JPS5596162U JP17592778U JP17592778U JPS5596162U JP S5596162 U JPS5596162 U JP S5596162U JP 17592778 U JP17592778 U JP 17592778U JP 17592778 U JP17592778 U JP 17592778U JP S5596162 U JPS5596162 U JP S5596162U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17592778U JPS5596162U (enExample) | 1978-12-25 | 1978-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17592778U JPS5596162U (enExample) | 1978-12-25 | 1978-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5596162U true JPS5596162U (enExample) | 1980-07-03 |
Family
ID=29183958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17592778U Pending JPS5596162U (enExample) | 1978-12-25 | 1978-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5596162U (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5099976A (enExample) * | 1974-01-09 | 1975-08-08 | ||
| JPS50147439A (enExample) * | 1974-05-20 | 1975-11-26 | ||
| JPS5458690A (en) * | 1977-10-19 | 1979-05-11 | Hitachi Ltd | Vapor deposition apparatus |
-
1978
- 1978-12-25 JP JP17592778U patent/JPS5596162U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5099976A (enExample) * | 1974-01-09 | 1975-08-08 | ||
| JPS50147439A (enExample) * | 1974-05-20 | 1975-11-26 | ||
| JPS5458690A (en) * | 1977-10-19 | 1979-05-11 | Hitachi Ltd | Vapor deposition apparatus |