JPS5596162U - - Google Patents

Info

Publication number
JPS5596162U
JPS5596162U JP17592778U JP17592778U JPS5596162U JP S5596162 U JPS5596162 U JP S5596162U JP 17592778 U JP17592778 U JP 17592778U JP 17592778 U JP17592778 U JP 17592778U JP S5596162 U JPS5596162 U JP S5596162U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17592778U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17592778U priority Critical patent/JPS5596162U/ja
Publication of JPS5596162U publication Critical patent/JPS5596162U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17592778U 1978-12-25 1978-12-25 Pending JPS5596162U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17592778U JPS5596162U (enrdf_load_stackoverflow) 1978-12-25 1978-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17592778U JPS5596162U (enrdf_load_stackoverflow) 1978-12-25 1978-12-25

Publications (1)

Publication Number Publication Date
JPS5596162U true JPS5596162U (enrdf_load_stackoverflow) 1980-07-03

Family

ID=29183958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17592778U Pending JPS5596162U (enrdf_load_stackoverflow) 1978-12-25 1978-12-25

Country Status (1)

Country Link
JP (1) JPS5596162U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5099976A (enrdf_load_stackoverflow) * 1974-01-09 1975-08-08
JPS50147439A (enrdf_load_stackoverflow) * 1974-05-20 1975-11-26
JPS5458690A (en) * 1977-10-19 1979-05-11 Hitachi Ltd Vapor deposition apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5099976A (enrdf_load_stackoverflow) * 1974-01-09 1975-08-08
JPS50147439A (enrdf_load_stackoverflow) * 1974-05-20 1975-11-26
JPS5458690A (en) * 1977-10-19 1979-05-11 Hitachi Ltd Vapor deposition apparatus

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