JPS5588334A - Mask for fabricating integrated circuit - Google Patents

Mask for fabricating integrated circuit

Info

Publication number
JPS5588334A
JPS5588334A JP13304679A JP13304679A JPS5588334A JP S5588334 A JPS5588334 A JP S5588334A JP 13304679 A JP13304679 A JP 13304679A JP 13304679 A JP13304679 A JP 13304679A JP S5588334 A JPS5588334 A JP S5588334A
Authority
JP
Japan
Prior art keywords
mask
integrated circuit
fabricating integrated
fabricating
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13304679A
Other languages
English (en)
Inventor
Meieru Heruberuto
Reebatsuha Erunsuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Censor Patent und Versuchsanstalt
Original Assignee
Censor Patent und Versuchsanstalt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Censor Patent und Versuchsanstalt filed Critical Censor Patent und Versuchsanstalt
Publication of JPS5588334A publication Critical patent/JPS5588334A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/48—Protective coatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP13304679A 1978-10-17 1979-10-17 Mask for fabricating integrated circuit Pending JPS5588334A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782845147 DE2845147B1 (de) 1978-10-17 1978-10-17 Projektionsmaske

Publications (1)

Publication Number Publication Date
JPS5588334A true JPS5588334A (en) 1980-07-04

Family

ID=6052390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13304679A Pending JPS5588334A (en) 1978-10-17 1979-10-17 Mask for fabricating integrated circuit

Country Status (2)

Country Link
JP (1) JPS5588334A (ja)
DE (1) DE2845147B1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61502080A (ja) * 1984-05-03 1986-09-18 アメリカン テレフオン アンド テレグラフ カムパニ− 焦点面調節フォトマスクおよび感光性ワ−クピ−ス面上への像投映法
JPH05508487A (ja) * 1991-05-17 1993-11-25 デュポン・フォトマスクス・インコーポレイテッド 圧力解放性ペリクル

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4361643A (en) * 1981-01-05 1982-11-30 Western Electric Co., Inc. Photomask and method of using same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61502080A (ja) * 1984-05-03 1986-09-18 アメリカン テレフオン アンド テレグラフ カムパニ− 焦点面調節フォトマスクおよび感光性ワ−クピ−ス面上への像投映法
JPH0549214B2 (ja) * 1984-05-03 1993-07-23 American Telephone & Telegraph
JPH05508487A (ja) * 1991-05-17 1993-11-25 デュポン・フォトマスクス・インコーポレイテッド 圧力解放性ペリクル

Also Published As

Publication number Publication date
DE2845147B1 (de) 1980-01-17
DE2845147C2 (ja) 1980-09-11

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