JPS5587358U - - Google Patents
Info
- Publication number
- JPS5587358U JPS5587358U JP17128878U JP17128878U JPS5587358U JP S5587358 U JPS5587358 U JP S5587358U JP 17128878 U JP17128878 U JP 17128878U JP 17128878 U JP17128878 U JP 17128878U JP S5587358 U JPS5587358 U JP S5587358U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17128878U JPS584922Y2 (en) | 1978-12-12 | 1978-12-12 | Zinc oxide thin film production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17128878U JPS584922Y2 (en) | 1978-12-12 | 1978-12-12 | Zinc oxide thin film production equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5587358U true JPS5587358U (en) | 1980-06-16 |
| JPS584922Y2 JPS584922Y2 (en) | 1983-01-27 |
Family
ID=29175043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17128878U Expired JPS584922Y2 (en) | 1978-12-12 | 1978-12-12 | Zinc oxide thin film production equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS584922Y2 (en) |
-
1978
- 1978-12-12 JP JP17128878U patent/JPS584922Y2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS584922Y2 (en) | 1983-01-27 |