JPS5580366U - - Google Patents

Info

Publication number
JPS5580366U
JPS5580366U JP11767579U JP11767579U JPS5580366U JP S5580366 U JPS5580366 U JP S5580366U JP 11767579 U JP11767579 U JP 11767579U JP 11767579 U JP11767579 U JP 11767579U JP S5580366 U JPS5580366 U JP S5580366U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11767579U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11767579U priority Critical patent/JPS5580366U/ja
Publication of JPS5580366U publication Critical patent/JPS5580366U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11767579U 1979-08-27 1979-08-27 Pending JPS5580366U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11767579U JPS5580366U (ko) 1979-08-27 1979-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11767579U JPS5580366U (ko) 1979-08-27 1979-08-27

Publications (1)

Publication Number Publication Date
JPS5580366U true JPS5580366U (ko) 1980-06-03

Family

ID=29071335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11767579U Pending JPS5580366U (ko) 1979-08-27 1979-08-27

Country Status (1)

Country Link
JP (1) JPS5580366U (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01283367A (ja) * 1988-05-09 1989-11-14 Mitsubishi Metal Corp スパッタリング用ターゲットの製造方法
WO2014057608A1 (ja) * 2012-10-12 2014-04-17 株式会社神戸製鋼所 Ｐｖｄ処理方法及びｐｖｄ処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5156788A (ja) * 1974-11-14 1976-05-18 Nichiden Varian Kk Supatsutasochotaagetsutodenkyoku

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5156788A (ja) * 1974-11-14 1976-05-18 Nichiden Varian Kk Supatsutasochotaagetsutodenkyoku

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01283367A (ja) * 1988-05-09 1989-11-14 Mitsubishi Metal Corp スパッタリング用ターゲットの製造方法
WO2014057608A1 (ja) * 2012-10-12 2014-04-17 株式会社神戸製鋼所 Ｐｖｄ処理方法及びｐｖｄ処理装置

Similar Documents

Publication Publication Date Title
DE3050404A1 (ko)
FR2446684B3 (ko)
FR2447615B1 (ko)
BR8002583A (ko)
BR8006808A (ko)
FR2447442B3 (ko)
FR2446222B1 (ko)
FR2446570B1 (ko)
FR2446256B1 (ko)
FR2448799B1 (ko)
FR2449067B1 (ko)
FR2447178B1 (ko)
FR2446421B1 (ko)
FR2448702B3 (ko)
JPS5580366U (ko)
FR2447461B1 (ko)
FR2445743B1 (ko)
FR2448646B3 (ko)
DE2915331C2 (ko)
AT364253B (ko)
AU77669S (ko)
AU78270S (ko)
AU78271S (ko)
AU78390S (ko)
AU78569S (ko)