JPS557703B2 - - Google Patents

Info

Publication number
JPS557703B2
JPS557703B2 JP3110577A JP3110577A JPS557703B2 JP S557703 B2 JPS557703 B2 JP S557703B2 JP 3110577 A JP3110577 A JP 3110577A JP 3110577 A JP3110577 A JP 3110577A JP S557703 B2 JPS557703 B2 JP S557703B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3110577A
Other languages
Japanese (ja)
Other versions
JPS53116779A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3110577A priority Critical patent/JPS53116779A/ja
Publication of JPS53116779A publication Critical patent/JPS53116779A/ja
Publication of JPS557703B2 publication Critical patent/JPS557703B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Formation Of Insulating Films (AREA)
JP3110577A 1977-03-23 1977-03-23 Selective oxidation method of semiconductor Granted JPS53116779A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3110577A JPS53116779A (en) 1977-03-23 1977-03-23 Selective oxidation method of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3110577A JPS53116779A (en) 1977-03-23 1977-03-23 Selective oxidation method of semiconductor

Publications (2)

Publication Number Publication Date
JPS53116779A JPS53116779A (en) 1978-10-12
JPS557703B2 true JPS557703B2 (enrdf_load_stackoverflow) 1980-02-27

Family

ID=12322112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3110577A Granted JPS53116779A (en) 1977-03-23 1977-03-23 Selective oxidation method of semiconductor

Country Status (1)

Country Link
JP (1) JPS53116779A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147915U (enrdf_load_stackoverflow) * 1988-03-30 1989-10-13

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1923265B2 (de) * 1969-05-07 1972-06-22 Licentia Patent Verwaltungs GmbH, 6000 Frankfurt Verfahren zum herstellen eines feldeffekttransistors mit isolierter steuerelektrode
JPS5188179A (en) * 1975-01-31 1976-08-02 cvd honyorusankamakunokeiseihoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147915U (enrdf_load_stackoverflow) * 1988-03-30 1989-10-13

Also Published As

Publication number Publication date
JPS53116779A (en) 1978-10-12

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