JPS5575618A - Measuring unit for physical quantity in vacuum vessel - Google Patents

Measuring unit for physical quantity in vacuum vessel

Info

Publication number
JPS5575618A
JPS5575618A JP14795478A JP14795478A JPS5575618A JP S5575618 A JPS5575618 A JP S5575618A JP 14795478 A JP14795478 A JP 14795478A JP 14795478 A JP14795478 A JP 14795478A JP S5575618 A JPS5575618 A JP S5575618A
Authority
JP
Japan
Prior art keywords
arm
bellows
vacuum vessel
sensor
air tight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14795478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6118963B2 (enExample
Inventor
Yasushi Aikawa
Toru Matoba
Taro Iwamoto
Moritomo Ando
Takashi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Japan Atomic Energy Agency
Original Assignee
Hitachi Ltd
Japan Atomic Energy Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Japan Atomic Energy Research Institute filed Critical Hitachi Ltd
Priority to JP14795478A priority Critical patent/JPS5575618A/ja
Publication of JPS5575618A publication Critical patent/JPS5575618A/ja
Publication of JPS6118963B2 publication Critical patent/JPS6118963B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Plasma Technology (AREA)
JP14795478A 1978-12-01 1978-12-01 Measuring unit for physical quantity in vacuum vessel Granted JPS5575618A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14795478A JPS5575618A (en) 1978-12-01 1978-12-01 Measuring unit for physical quantity in vacuum vessel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14795478A JPS5575618A (en) 1978-12-01 1978-12-01 Measuring unit for physical quantity in vacuum vessel

Publications (2)

Publication Number Publication Date
JPS5575618A true JPS5575618A (en) 1980-06-07
JPS6118963B2 JPS6118963B2 (enExample) 1986-05-15

Family

ID=15441829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14795478A Granted JPS5575618A (en) 1978-12-01 1978-12-01 Measuring unit for physical quantity in vacuum vessel

Country Status (1)

Country Link
JP (1) JPS5575618A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4375170A (en) * 1981-03-27 1983-03-01 Beckman Instruments, Inc. Decontaminating fluid sensor mechanism
US5076108A (en) * 1990-08-23 1991-12-31 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administrator Probe insertion apparatus with inflatable seal
US5174165A (en) * 1990-08-13 1992-12-29 Westinghouse Electric Corp. Flexible delivery system for a rotatable probe
JP2006153672A (ja) * 2004-11-29 2006-06-15 Chemitoronics Co Ltd 圧力・温度分布計測システム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4375170A (en) * 1981-03-27 1983-03-01 Beckman Instruments, Inc. Decontaminating fluid sensor mechanism
US5174165A (en) * 1990-08-13 1992-12-29 Westinghouse Electric Corp. Flexible delivery system for a rotatable probe
US5076108A (en) * 1990-08-23 1991-12-31 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administrator Probe insertion apparatus with inflatable seal
JP2006153672A (ja) * 2004-11-29 2006-06-15 Chemitoronics Co Ltd 圧力・温度分布計測システム

Also Published As

Publication number Publication date
JPS6118963B2 (enExample) 1986-05-15

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