JPS5572108U - - Google Patents
Info
- Publication number
- JPS5572108U JPS5572108U JP1978155946U JP15594678U JPS5572108U JP S5572108 U JPS5572108 U JP S5572108U JP 1978155946 U JP1978155946 U JP 1978155946U JP 15594678 U JP15594678 U JP 15594678U JP S5572108 U JPS5572108 U JP S5572108U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978155946U JPS5820885Y2 (en) | 1978-11-13 | 1978-11-13 | pattern inspection equipment |
| PCT/JP1979/000271 WO1980001002A1 (en) | 1978-10-30 | 1979-10-25 | Pattern inspection system |
| US06/197,345 US4392120A (en) | 1978-10-30 | 1979-10-25 | Pattern inspection system |
| ES79485536A ES485536A1 (en) | 1978-10-30 | 1979-10-30 | Pattern inspection system |
| US06/428,605 US4547895A (en) | 1978-10-30 | 1982-09-30 | Pattern inspection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978155946U JPS5820885Y2 (en) | 1978-11-13 | 1978-11-13 | pattern inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5572108U true JPS5572108U (en) | 1980-05-17 |
| JPS5820885Y2 JPS5820885Y2 (en) | 1983-05-02 |
Family
ID=29145456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978155946U Expired JPS5820885Y2 (en) | 1978-10-30 | 1978-11-13 | pattern inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5820885Y2 (en) |
-
1978
- 1978-11-13 JP JP1978155946U patent/JPS5820885Y2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5820885Y2 (en) | 1983-05-02 |