JPS557179B2 - - Google Patents
Info
- Publication number
- JPS557179B2 JPS557179B2 JP15966475A JP15966475A JPS557179B2 JP S557179 B2 JPS557179 B2 JP S557179B2 JP 15966475 A JP15966475 A JP 15966475A JP 15966475 A JP15966475 A JP 15966475A JP S557179 B2 JPS557179 B2 JP S557179B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7500050A FR2296847A1 (fr) | 1975-01-02 | 1975-01-02 | Procede et dispositif d'analyse elementaire et chimique d'un echantillon par analyse spectrale des energies des electrons secondaires |
| FR7516206A FR2312031A2 (fr) | 1975-05-23 | 1975-05-23 | Procede et dispositif d'analyse elementaire et chimique d'un echantillon par analyse spectrale des energies des electrons secondaires |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5189790A JPS5189790A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-08-06 |
| JPS557179B2 true JPS557179B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-02-22 |
Family
ID=26218671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15966475A Expired JPS557179B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-01-02 | 1975-12-29 |
Country Status (10)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162129U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-04-27 | 1989-11-10 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5226284A (en) * | 1975-08-22 | 1977-02-26 | Jeol Ltd | Auger electron spectroscopic apparatus |
| US4559450A (en) * | 1982-08-06 | 1985-12-17 | Unisearch Limited | Quantitative compositional analyser for use with scanning electron microscopes |
| US4492866A (en) * | 1983-05-02 | 1985-01-08 | The United States Of America As Represented By The Secretary Of The Navy | Method for predicting the performance of cathode materials |
| NL8600685A (nl) * | 1986-03-18 | 1987-10-16 | Philips Nv | Apparaat voor energie selectieve afbeelding. |
| NL8902727A (nl) * | 1989-11-06 | 1991-06-03 | Philips Nv | Objecthouder voor ondersteuning van een object in een geladen deeltjesbundelsysteem. |
| JPH04264243A (ja) * | 1991-02-20 | 1992-09-21 | Jeol Ltd | オージェ像計測におけるピークエネルギーシフト補正法 |
| RU2124716C1 (ru) * | 1997-06-25 | 1999-01-10 | Научно-исследовательский физико-химический институт им.Л.Я.Карпова | Способ анализа твердых тел |
| US6635869B2 (en) * | 2001-02-26 | 2003-10-21 | Fei Company | Step function determination of Auger peak intensity |
| US8283631B2 (en) * | 2008-05-08 | 2012-10-09 | Kla-Tencor Corporation | In-situ differential spectroscopy |
| CA2789384A1 (en) * | 2010-03-12 | 2011-09-15 | Societe De Commercialisation Des Produits De La Recherche Appliquee - So Cpra Sciences Sante Et Humaines S.E.C. | Method of generating low-energy secondary electrons for applications in biological sciences, radiochemistry, and chemistry of polymers and physics of radiotherapy |
| CN104035125A (zh) * | 2014-06-12 | 2014-09-10 | 电子科技大学 | 一种带电粒子与边界互作用的概率性模拟方法 |
| US11508551B2 (en) * | 2018-12-14 | 2022-11-22 | Kla Corporation | Detection and correction of system responses in real-time |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3535516A (en) * | 1966-10-17 | 1970-10-20 | Hitachi Ltd | Electron microscope employing a modulated scanning beam and a phase sensitive detector to improve the signal to noise ratio |
| US3461306A (en) * | 1967-04-27 | 1969-08-12 | Gen Electric | Electron probe microanalyzer for measuring the differential energy response of auger electrons |
| GB1286454A (en) * | 1968-08-24 | 1972-08-23 | Cambridge Scientific Instr Ltd | Surface potential analysis by electron beams |
| JPS4929882A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-07-14 | 1974-03-16 |
-
1975
- 1975-10-14 DE DE19752546053 patent/DE2546053A1/de not_active Withdrawn
- 1975-10-14 GB GB42084/75A patent/GB1530277A/en not_active Expired
- 1975-12-16 US US05/641,240 patent/US4034220A/en not_active Expired - Lifetime
- 1975-12-22 CA CA242,530A patent/CA1048163A/en not_active Expired
- 1975-12-24 CH CH1677775A patent/CH592306A5/xx not_active IP Right Cessation
- 1975-12-24 IL IL48721A patent/IL48721A/xx unknown
- 1975-12-29 SE SE7514717A patent/SE413556B/xx unknown
- 1975-12-29 JP JP15966475A patent/JPS557179B2/ja not_active Expired
- 1975-12-31 NL NL7515242A patent/NL7515242A/xx not_active Application Discontinuation
-
1976
- 1976-01-02 ES ES444049A patent/ES444049A1/es not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162129U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-04-27 | 1989-11-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5189790A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-08-06 |
| IL48721A0 (en) | 1976-02-29 |
| NL7515242A (nl) | 1976-07-06 |
| ES444049A1 (es) | 1977-11-16 |
| US4034220A (en) | 1977-07-05 |
| CA1048163A (en) | 1979-02-06 |
| SE7514717L (sv) | 1976-07-05 |
| GB1530277A (en) | 1978-10-25 |
| SE413556B (sv) | 1980-06-02 |
| CH592306A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-10-31 |
| DE2546053A1 (de) | 1976-07-08 |
| IL48721A (en) | 1979-05-31 |