JPS557019B2 - - Google Patents
Info
- Publication number
- JPS557019B2 JPS557019B2 JP4613272A JP4613272A JPS557019B2 JP S557019 B2 JPS557019 B2 JP S557019B2 JP 4613272 A JP4613272 A JP 4613272A JP 4613272 A JP4613272 A JP 4613272A JP S557019 B2 JPS557019 B2 JP S557019B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
- Dicing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4613272A JPS557019B2 (nl) | 1972-05-10 | 1972-05-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4613272A JPS557019B2 (nl) | 1972-05-10 | 1972-05-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS498165A JPS498165A (nl) | 1974-01-24 |
JPS557019B2 true JPS557019B2 (nl) | 1980-02-21 |
Family
ID=12738445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4613272A Expired JPS557019B2 (nl) | 1972-05-10 | 1972-05-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS557019B2 (nl) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5737851A (en) * | 1980-08-20 | 1982-03-02 | Nec Corp | Semiconductor device |
JPS57164546A (en) * | 1981-04-03 | 1982-10-09 | Oki Electric Ind Co Ltd | Semiconductor device |
JPS5871642A (ja) * | 1981-10-23 | 1983-04-28 | Nec Corp | 半導体装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2066471A5 (nl) * | 1969-10-25 | 1971-08-06 | Nippon Electric Co | |
US3634203A (en) * | 1969-07-22 | 1972-01-11 | Texas Instruments Inc | Thin film metallization processes for microcircuits |
-
1972
- 1972-05-10 JP JP4613272A patent/JPS557019B2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3634203A (en) * | 1969-07-22 | 1972-01-11 | Texas Instruments Inc | Thin film metallization processes for microcircuits |
FR2066471A5 (nl) * | 1969-10-25 | 1971-08-06 | Nippon Electric Co |
Also Published As
Publication number | Publication date |
---|---|
JPS498165A (nl) | 1974-01-24 |