JPS557019B2 - - Google Patents

Info

Publication number
JPS557019B2
JPS557019B2 JP4613272A JP4613272A JPS557019B2 JP S557019 B2 JPS557019 B2 JP S557019B2 JP 4613272 A JP4613272 A JP 4613272A JP 4613272 A JP4613272 A JP 4613272A JP S557019 B2 JPS557019 B2 JP S557019B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4613272A
Other languages
Japanese (ja)
Other versions
JPS498165A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4613272A priority Critical patent/JPS557019B2/ja
Publication of JPS498165A publication Critical patent/JPS498165A/ja
Publication of JPS557019B2 publication Critical patent/JPS557019B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP4613272A 1972-05-10 1972-05-10 Expired JPS557019B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4613272A JPS557019B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-05-10 1972-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4613272A JPS557019B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-05-10 1972-05-10

Publications (2)

Publication Number Publication Date
JPS498165A JPS498165A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-24
JPS557019B2 true JPS557019B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-02-21

Family

ID=12738445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4613272A Expired JPS557019B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-05-10 1972-05-10

Country Status (1)

Country Link
JP (1) JPS557019B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737851A (en) * 1980-08-20 1982-03-02 Nec Corp Semiconductor device
JPS57164546A (en) * 1981-04-03 1982-10-09 Oki Electric Ind Co Ltd Semiconductor device
JPS5871642A (ja) * 1981-10-23 1983-04-28 Nec Corp 半導体装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3634203A (en) * 1969-07-22 1972-01-11 Texas Instruments Inc Thin film metallization processes for microcircuits
US3741880A (en) * 1969-10-25 1973-06-26 Nippon Electric Co Method of forming electrical connections in a semiconductor integrated circuit

Also Published As

Publication number Publication date
JPS498165A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-24

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