JPS556811B2 - - Google Patents

Info

Publication number
JPS556811B2
JPS556811B2 JP9340776A JP9340776A JPS556811B2 JP S556811 B2 JPS556811 B2 JP S556811B2 JP 9340776 A JP9340776 A JP 9340776A JP 9340776 A JP9340776 A JP 9340776A JP S556811 B2 JPS556811 B2 JP S556811B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9340776A
Other languages
Japanese (ja)
Other versions
JPS5319663A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9340776A priority Critical patent/JPS5319663A/ja
Publication of JPS5319663A publication Critical patent/JPS5319663A/ja
Publication of JPS556811B2 publication Critical patent/JPS556811B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP9340776A 1976-08-05 1976-08-05 Cleaning chamber dealing with harmful substance Granted JPS5319663A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9340776A JPS5319663A (en) 1976-08-05 1976-08-05 Cleaning chamber dealing with harmful substance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9340776A JPS5319663A (en) 1976-08-05 1976-08-05 Cleaning chamber dealing with harmful substance

Publications (2)

Publication Number Publication Date
JPS5319663A JPS5319663A (en) 1978-02-23
JPS556811B2 true JPS556811B2 (fr) 1980-02-20

Family

ID=14081434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9340776A Granted JPS5319663A (en) 1976-08-05 1976-08-05 Cleaning chamber dealing with harmful substance

Country Status (1)

Country Link
JP (1) JPS5319663A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788004U (fr) * 1980-11-18 1982-05-31
JPS63146702U (fr) * 1987-03-19 1988-09-28
JPH027514U (fr) * 1988-06-28 1990-01-18
JPH0212614U (fr) * 1988-07-07 1990-01-26

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037451A (fr) * 1973-08-03 1975-04-08
JPS5131566U (fr) * 1974-08-30 1976-03-08

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037451A (fr) * 1973-08-03 1975-04-08
JPS5131566U (fr) * 1974-08-30 1976-03-08

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788004U (fr) * 1980-11-18 1982-05-31
JPS63146702U (fr) * 1987-03-19 1988-09-28
JPH027514U (fr) * 1988-06-28 1990-01-18
JPH0212614U (fr) * 1988-07-07 1990-01-26

Also Published As

Publication number Publication date
JPS5319663A (en) 1978-02-23

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