JPS5319663A - Cleaning chamber dealing with harmful substance - Google Patents
Cleaning chamber dealing with harmful substanceInfo
- Publication number
- JPS5319663A JPS5319663A JP9340776A JP9340776A JPS5319663A JP S5319663 A JPS5319663 A JP S5319663A JP 9340776 A JP9340776 A JP 9340776A JP 9340776 A JP9340776 A JP 9340776A JP S5319663 A JPS5319663 A JP S5319663A
- Authority
- JP
- Japan
- Prior art keywords
- dealing
- cleaning chamber
- harmful substance
- harmful
- substance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9340776A JPS5319663A (en) | 1976-08-05 | 1976-08-05 | Cleaning chamber dealing with harmful substance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9340776A JPS5319663A (en) | 1976-08-05 | 1976-08-05 | Cleaning chamber dealing with harmful substance |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5319663A true JPS5319663A (en) | 1978-02-23 |
JPS556811B2 JPS556811B2 (en) | 1980-02-20 |
Family
ID=14081434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9340776A Granted JPS5319663A (en) | 1976-08-05 | 1976-08-05 | Cleaning chamber dealing with harmful substance |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5319663A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5788004U (en) * | 1980-11-18 | 1982-05-31 | ||
JPS63146702U (en) * | 1987-03-19 | 1988-09-28 | ||
JPH027514U (en) * | 1988-06-28 | 1990-01-18 | ||
JPH0212614U (en) * | 1988-07-07 | 1990-01-26 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5037451A (en) * | 1973-08-03 | 1975-04-08 | ||
JPS5131566U (en) * | 1974-08-30 | 1976-03-08 |
-
1976
- 1976-08-05 JP JP9340776A patent/JPS5319663A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5037451A (en) * | 1973-08-03 | 1975-04-08 | ||
JPS5131566U (en) * | 1974-08-30 | 1976-03-08 |
Also Published As
Publication number | Publication date |
---|---|
JPS556811B2 (en) | 1980-02-20 |
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