JPS556706B2 - - Google Patents
Info
- Publication number
- JPS556706B2 JPS556706B2 JP9783576A JP9783576A JPS556706B2 JP S556706 B2 JPS556706 B2 JP S556706B2 JP 9783576 A JP9783576 A JP 9783576A JP 9783576 A JP9783576 A JP 9783576A JP S556706 B2 JPS556706 B2 JP S556706B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9783576A JPS5322878A (en) | 1976-08-13 | 1976-08-13 | Vacuum evaporation apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9783576A JPS5322878A (en) | 1976-08-13 | 1976-08-13 | Vacuum evaporation apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5322878A JPS5322878A (en) | 1978-03-02 |
| JPS556706B2 true JPS556706B2 (de) | 1980-02-19 |
Family
ID=14202764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9783576A Granted JPS5322878A (en) | 1976-08-13 | 1976-08-13 | Vacuum evaporation apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5322878A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53114786A (en) * | 1977-03-18 | 1978-10-06 | Toko Inc | Method of manufacturing zinc oxide thin film |
-
1976
- 1976-08-13 JP JP9783576A patent/JPS5322878A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5322878A (en) | 1978-03-02 |