JPS556703B2 - - Google Patents
Info
- Publication number
- JPS556703B2 JPS556703B2 JP5582575A JP5582575A JPS556703B2 JP S556703 B2 JPS556703 B2 JP S556703B2 JP 5582575 A JP5582575 A JP 5582575A JP 5582575 A JP5582575 A JP 5582575A JP S556703 B2 JPS556703 B2 JP S556703B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5582575A JPS51130645A (en) | 1975-05-08 | 1975-05-08 | Method of forming film in vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5582575A JPS51130645A (en) | 1975-05-08 | 1975-05-08 | Method of forming film in vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51130645A JPS51130645A (en) | 1976-11-13 |
| JPS556703B2 true JPS556703B2 (de) | 1980-02-19 |
Family
ID=13009725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5582575A Granted JPS51130645A (en) | 1975-05-08 | 1975-05-08 | Method of forming film in vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51130645A (de) |
-
1975
- 1975-05-08 JP JP5582575A patent/JPS51130645A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51130645A (en) | 1976-11-13 |